Teijin Seiki Co., Ltd.

Hiroki Mori

Tetsuya Watanabe

Chohei Okuno

Akio Hashimoto

Takahiro Maekawa

Herein disclosed is a robot arm mechanism comprising a first arm link mechanism and a second arm link mechanism, a robot arm driving mechanism for driving the first arm link mechanism and the second arm link mechanism, and a link retaining mechanism for pivotably retaining the first arm link mechanism and the second arm link mechanism, in which a third arm link and a fourth arm link of the first arm link mechanism are kept forward in a first rotation direction, in which the first arm link mechanism and the second arm link mechanism are extended, thereby enabling to prevent the quadric crank chain constituting the robot arm mechanism from being flattened out while the first arm link mechanism and the second arm link mechanism are extended, and improving resistance to deformation, in comparison with the conventional robot arm mechanism.

Robot arm mechanism

Herein disclosed is a shaft sealing apparatus which comprises a vacuum casing formed with a vacuum chamber, a driving shaft having an outer cylindrical surface and movably extending in the vacuum chamber of the vacuum casing, and a sealing ring in the form of an annular ring shape and including a sealing lip held in contact with the outer cylindrical surface of the driving shaft, an annular spring member operative to impart a force to the sealing lip to ensure that the sealing lip is held in tight contact with the outer cylindrical surface of the driving shaft, and a peripheral portion radially outwardly extending from the sealing lip, in which the outer cylindrical surface of the driving shaft is smaller in surface roughness Ra than 0.1 (&#x3bc;m).

Shaft sealing assembly for vacuum processing apparatus

Shaft sealing apparatus

Herein disclosed is a robot arm mechanism comprising: a first handling member for supporting and handling a first object; a second handling member for supporting and handling a second object; a first robot arm including a first arm link and a second arm link, the first end portion of the second arm link being pivotably connected to the second end portion of the first arm link, and the second end portion of the second arm link being connected to the first handling member to allow the first handling member to support the first object in a stable condition; a second robot arm including a first arm link and a second arm link, the first end portion of the second arm link being pivotably connected to the second end portion of the first arm link, the second arm link being inclined with respect to the second arm link of the first robot arm at a preset angle defined between the central line of the second arm link of the second robot arm and the central line of the second arm link of the first robot arm, and the second end portion of the second arm link being connected to the second handling member to allow the second handling member to support the second object in a stable condition; a robot arm moving mechanism for allowing one of the first arm links and of the first and second robot arms to be angularly moved with respect to the other of the first arm links of the first and second robot arms; and an angle keeping mechanism for keeping substantially fixed the preset angle defined between the central line of the second arm link of the second robot arm and the central line of the second arm link of the first robot arm as one of the first arm links of the first and second robot arms is angularly moved with respect to the other of the first arm links of the first and second robot arms.

Robot arm mechanism and robot apparatus

A traction drive speed reducer which comprises circumscribed axes A and B, a plurality of intermediate axes A and B arranged contacting around the outer periphery of the circumscribed axes, and inscribed cylinders A and B inscribing the outer periphery of the intermediate axes, and in which a supporting member to rotatably support the intermediate axes is fixed, a drive motor is connected to at least one of the plurality of intermediate axes, and an output is taken from the circumscribed axis having the larger diameter than the outer diameter of the intermediate axis.

Traction drive speed reducer, conveyance apparatus using traction drive speed reducer, and arrangement of two-axis output encoder in conveyance apparatus

A robot arm mechanism includes a handling member for supporting and handling an object, a robot arm made up of a plurality of links, and a robot arm driving mechanism for driving the robot arm to assume its contracted and extended position. The robot arm comprises first and second arm links, a link retaining mechanism pivotably retaining the first and second arm links and a link operating mechanism to operate one of the first and second arm links by a motion of the other of the first and second arm links. The link operating mechanism comprises a crank, a coupling link and a connecting link. The crank integrally connected to the coupling link is pivotably connected to one of the first and second arms and to the link retaining mechanism. The connecting link is pivotably connected to the other of the first and second arms. This leads to the advantage that the robot arms can be contracted and extended and rotated by only two electric motors.

In a transmission gear for transmitting two rotary motions from a driving mechanism to a working mechanism, the transmission gear comprises a cylindrical support member, a flexible cylindrical member fixedly supported by the cylindrical support member, first and second input shaft members, and first and second output shaft members. The first and second input shaft members have non-circular peripheral portions, respectively. The first and second output shaft members have internal circular portions radially opposite to and spaced apart from the non-circular peripheral portions of the first and second input shaft members, respectively. The flexible cylindrical member interposes between the non-circular peripheral portions of the first and second input shaft members and the internal circular portions of the first and second output shaft members. The flexible cylindrical member further having a buffer portion between the first and second transformable intervening portions for allowing the first and second transformable intervening portions to transform independently of each other without interference, thereby transmitting the rotary motions from the first and second input shaft members to the first and second output shaft members, respectively, in independent relationship to each other.

Growing community of inventors

Tsu, Japan

Hiroki Mori