Yamaguchi University

Anritsu Infivis Co., Ltd.

Yamaguchi Technology Licensing Organization, Ltd.

Marunaka Co., Ltd.

Shinko Industries Co., Ltd.

Hiroki Kurisu

Setsuo Yamamoto

Mitsuru Matsuura

Atsushi Takemura

Naoki Takada

Yoshifumi Takahashi

Hiroyuki Koba

Jyunichi Moriya

Mitsugu Nakagawa

Katsushi Tsuge

Yukihiro Ishikawa

Masaki Hesaka

Ishikawa Yukihiro

An X-ray tube, including: an envelope () that holds inside thereof at a predetermined pressure; a filament () for emitting electrons and a focus electrode () provided in the envelope: and a target () for generating X-ray provided in the envelope facing to the filament () and the focus electrode (), wherein the envelope () has an envelope body () and an X-ray window portion () having a higher X-rays transmissivity and a higher electric conductivity than the envelope body (), when the X-ray window portion () or the anode () is set to a lower electric potential than both of an electric potential of the anode () or the X-ray window portion () and an electric potential of the filament () and the focus electrode (), detection of at least one of an ion current (Ii) or an electron current (Ie) through the X-ray window portion () or the anode () is possible.

X-ray tube and X-ray generation device

Provided are a leakage inspection apparatus and a leakage inspection method for inspecting the flow rate of leakage from a tested body disposed in a tested-body chamber. The leakage inspection apparatus includes liquid supplying and pressurizing meansfor supplying a probe liquid to the inside of the tested-body chamberand pressurizing the probe liquid to a high pressure 0.1 MPa or more, vacuum evacuation means--and a quadrupole mass spectrometer. The tested bodyis evacuated, the probe liquid is supplied to the inside of the tested body and pressurized to 0.1 MPa or more and the concentration of a probe medium leaked from the tested body and evaporated in a vacuum is measured by the quadrupole mass spectrometer, thereby measuring the flow rate of leakage from the tested body. This makes it possible to determine the flow rate of leakage using a liquid as a probe medium and simultaneously possible to perform a pressure tightness inspection at an atmospheric pressure of 0.1 MPa or more, especially at a high pressure ranging from 1 MPa to 1 GPa.

Leakage inspection apparatus and leakage inspection method

The objective of the present invention is to provide a titanium alloy vacuum container and vacuum parts that can easily achieve an ultra-high vacuum in a short time through vacuum evacuation. The titanium alloy of the titanium alloy vacuum container and vacuum parts has a compact structure composed of fine grains, each having a size of approximately not more than 10 &#x3bc;m, with a surface that is exposed to at least vacuum being set to have a surface roughness of not more than 50 nm; and in this structure, preferably, the surface roughness thereof may be set to not more than 10 nm, the titanium alloy may have a hardness in a range of not less than 230 Hv to not more than 310 Hv, and the titanium alloy may have a passivity surface film made by a thin titanium oxide layer or nitride layer that is formed on the surface thereof. The titanium alloy, which is desirably used in such titanium alloy vacuum container and vacuum parts, contains 0.3 wt. % to 0.5 wt. % of iron and 0.3 wt. % to 0.5 wt. % of oxygen, and the remainder thereof is made from Ti obligatory impurities.

Titanium alloy vacuum and vacuum part

Growing community of inventors

Ube, Japan

Hiroki Kurisu