Seiko Epson Corporation

Hiroki Kawai

Toshiyuki Kamiya

Akira Matsuzawa

Hideaki Oka

Takanobu Matsumoto

Hiroshi Komatsu

Hideo Miyasaka

Mitsuhiro Tateyama

Nobuyuki Mizushima

Yoshiteru Nishimura

Akinori Yamada

Makoto Furuhata

Yasuhiro Shimodaira

Tatsushi Kato

Shoichi Nagamatsu

Yuji Hamayama

A horizontal articulated robot includes a base; a first arm coupled to the base and configured to turn around a first axis, a second arm coupled to the first arm and configured to turn around a second axis parallel to the first axis, a third arm coupled to the second arm and configured to turn around a third axis parallel to the first axis and move along the third axis, a supporting section provided in the second arm and configured to support the third arm, and a force detecting section provided between the second arm and the supporting section and configured to detect force applied to the third arm.

Horizontal articulated robot

A sensor element includes a first reference potential side terminal located between a first signal side terminal and a second signal side terminal along a first axis passing through the first signal side terminal and the second signal side terminal in a plan view from a direction in which a first piezoelectric element and a second piezoelectric element are stacked and a second reference potential side terminal located between the first signal side terminal and the second signal side terminal along the first axis in the plan view from the direction. The first axis is located between the first reference potential side terminal and the second reference potential side terminal in the plain view from the direction.

Sensor element, sensor device, force detection apparatus, and robot

A sensor device includes a base body including a recess, a lid body configured to close an opening of the recess, a force detection element disposed in the recess and configured to output an electric charge according to a received external force, and an electronic component disposed in the recess and electrically connected to the force detection element. A separation distance between the electronic component and the lid body is larger than a separation distance between the force detection element and the lid body in the thickness direction of the lid body.

Sensor device, force detecting device, and robot

A sensor device includes a base body including a recess, a lid body configured to close an opening of the recess, a force detection element disposed in the recess and including a first element that outputs a first signal according to an external force in a first axis and a second element that stacks on the first element and outputs a second signal according to an external force in a second axis; a first circuit disposed in the recess and configured to process the first signal, and a second circuit disposed in the recess and configured to process the second signal.

Sensor device having a force detection element sandwiched by two sensor signal processing circuits

A force detector includes a first substrate, a second substrate, a circuit board provided between the first substrate and the second substrate, and an element mounted on the circuit board and outputting a signal in response to an external force, wherein a hole is formed in the circuit board at a location where the element is placed, and a first convex part inserted into the hole and protruding toward the element is provided on the first substrate. Further, the element is placed within a periphery of the first convex part as seen from a direction perpendicular to the first substrate.

Force detector, robot, electronic component carrying apparatus, electronic component testing apparatus, part processing apparatus, and moving object

A force detection apparatus includes a first member, a second member placed to be opposed to the first member, a sensor device placed between the first member and the second member and including a force detection element having at a piezoelectric element that outputs a signal according to an external force, and a pressurization bolt provided in an outer periphery of the sensor device in a plan view as seen from a direction in which the first member and the second member overlap and pressurizing the sensor device, wherein the first member has a groove which is between the sensor device and the pressurization bolt in the plan view.

Force detection apparatus and robot

A force detection apparatus includes a first member, a second member, a piezoelectric sensor device sandwiched by the first member and the second member and outputting electric charge according to an external force, and a conversion and output circuit converting an electric charge output from the piezoelectric sensor device into a voltage and outputting the voltage. When a detectable range of a component of the external force in a predetermined axis direction is a first range, the external force is detected within the first range. When the detectable range is a second range different from the first range, the external force is detected within the second range.

A force detecting device attachable to a robot including an arm includes a first base including a projection having an attachment surface to which an end effector is attachable, a second base attached to the arm, and at least one piezoelectric element supported between the first base and the second base and configured to detect external forces applied to the first base and the second base.

Force detecting device and robot

To obtain a force detection device and a robot light in weight and having excellent detection accuracy, a force detection device includes a first member, a second member joined to the first member, and a piezoelectric element joined to the second member. A material forming the first member is different from a material forming the second member. The first member is formed in a plate shape. The piezoelectric element and the second member are disposed at an end portion of the first member. A through-hole is formed in the center portion of the first member.

Force detection device and robot

A sensor device includes: a base having a recess; a force detecting element which is provided in the recess, and includes at least one piezoelectric element that outputs a signal in accordance with an external force; an adhesive which is provided between the force detecting element and a bottom surface of the recess; at least one electrode provided in the force detecting element; at least one terminal provided in the base; and at least one conductive paste which electrically connects the electrode and the terminal to each other, in which the conductive paste has a part that overlaps the adhesive when viewed from a direction in which the force detecting element and the bottom surface overlap each other, and in which the force detecting element overlaps the bottom surface when viewed from the direction in which the force detecting element and the bottom surface overlap each other.

Sensor device, force detection device, and robot

A force detecting device includes a first base section, a second base section, and a charge output element arranged between the first base section and the second base section. The charge output element includes a first board formed by a Y-cut quartz plate and a second board formed by a Y-cut quartz plate. The boards are laminated in a direction orthogonal to the normal an attachment surface of the second base section. The force detecting device detects an external force on the basis of a first output corresponding to a shearing force in a first detection direction orthogonal to the laminating direction of the first board and a second output corresponding to a shearing force in a second detection direction orthogonal to the laminating direction of the second board and crossing the first detection direction.

Force detecting device, robot, electronic component conveying apparatus

A force detection device includes a charge output element that outputs charge in accordance with a received external force, a conversion and output circuit, having a first switching element and a first capacitor, which converts the charge into a voltage and outputs the voltage, a compensation signal output circuit, having a second switching element and a second capacitor, which outputs a compensation signal, and an external force detection circuit that detects an external force on the basis of the voltage which is output from the conversion and output circuit and the compensation signal which is output from the compensation signal output circuit. The capacitance of the second capacitor is smaller than the capacitance of the first capacitor.

Force detection device, robot, and moving object

A sensor device includes a charge output element including a plurality of piezoelectric bodies and an internal electrode formed between the piezoelectric bodies, a package that houses the charge output element, first conductive paste electrically connected to a plurality of the internal electrodes, and second conductive paste that electrically connects the first conductive paste and an output terminal and has a modulus of elasticity lower than a modulus of elasticity of the first conductive paste. A Young's modulus of the first conductive paste is equal to or higher than 3.4 GPa and equal to or lower than 5.0 GPa and a Young's modulus of the second conductive paste is equal to or higher than 0.1 GPa and equal to or lower than 0.2 GPa.

Sensor device, force detecting device, robot, electronic component conveying apparatus, electronic component inspecting apparatus, and component machining apparatus

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Matsumoto, Japan

Hiroki Kawai