Surpass Industry Co., Ltd.

Hiroki Igarashi

Yoshihiro Ushigusa

Masahiro Hasunuma

Takashi Imai

Kazuki Hirai

Atsushi Inoue

Yukinobu Imai

Toshimi Sugiura

Daisuke Kanazawa

Mizuho Kouchi

There is provided a flow rate regulating device including a valve body section having a flat valve body surface, a valve seat section having a flat valve seat surface, a regulation mechanism that moves the valve body section along an axis, and a control unit that controls the regulation mechanism, wherein the regulation mechanism has a stepping motor that rotates a drive shaft about the axis, and a moving member that moves along the axis in response to the rotation of the drive shaft and is coupled to the valve body section, and the control unit controls the stepping motor so that the valve body section moves in a movement range in which the valve body surface and the valve seat surface maintain a non-contact state, in accordance with an excitation signal that changes by a micro step unit obtained by dividing a step by a predetermined division number.

Flow rate regulating device and control method of flow rate regulating device

To prevent a defect in which a liquid is retained in a vicinity of a valley of a bellows part and particles such as impurities are accumulated. Provided is a valve including a valve element part and a diaphragm part that is coupled to the valve element part. The diaphragm part includes a base, a tip part, and a bellows part that couples between the base and the tip part. A wetted part in contact with the liquid at the tip part is formed in a cylindrical shape extending along a shaft line X. A lower end part of the bellows part is connected to the wetted part in a connection position CP coinciding with an outer peripheral surface of the wetted part. The valley of the bellows part is disposed in the connection position CP.

Valve

Provided is a flow control apparatus including a flow passage having a tube pump placed therein, a flow meter placed downstream of the tube pump in the flow direction, the flow meter measuring a flow rate of liquid passing the flow passage, and a flow controller controlling a liquid output of the tube pump so that the flow rate measured by the flow meter matches a target flow rate. The flow passage includes a straight tubular second flow passage that is flexible to be elastically deformed by the pressure of the liquid, the second flow passage being placed downstream of the tube pump in the flow direction, and a third flow passage at which a cross-sectional flow area of the flow passage in a plane orthogonal to the flow direction is smallest, the third flow passage being placed downstream of the second flow passage in the flow direction.

Flow control apparatus

Provided is a thermal flow meter including a measurement tube made of resin having an inlet and an outlet, and an internal flow passage extending along an axis, a sensor substrate having a heating resistance wire and temperature detecting resistance wires formed on a detection surface along the axis, and a reinforcing plate. The sensor substrate is bonded to the measurement tube along the axis with an adhesive, and the reinforcing plate is bonded to the measurement tube along the axis with the adhesive with the internal flow passage interposed between the sensor substrate and the reinforcing plate.

Thermal flow meter with reinforcing plate and method of manufacturing the same

Provided is a thermal flow meter including an inlet-side body into which an inlet of a measurement tube is inserted, an outlet-side body into which an outlet of the measurement tube is inserted, an inlet-side nut having internal threads fastened to external threads formed on the inlet-side body, an outlet-side nut having internal threads fastened to external threads formed on the outlet-side body, an inlet-side ferrule of resin being deformed to form a seal area as the inlet-side nutis fastened to the inlet-side body, and an outlet-side ferrule of resin being deformed to form a seal area as the outlet-side nut is fastened to the outlet-side body.

Thermal flow meter having seal areas with deformed ferrules

There is provided a flow rate adjustment apparatus in which a flow rate measurement mechanism includes: a thermal flowmeter; and a lower casing, a flow rate adjustment mechanism includes: an electric drive mechanism that moves a valve body part; a control board; a valve main body in which a valve chamber, a second flow passage that communicates with a valve hole, and a third flow passage that is connected to an external flow passage have been formed; and an upper casing that houses the electric drive mechanism and the control board thereinside, the flow rate adjustment mechanism is attached to the flow rate measurement mechanism in a state where a clearance communicating with an outside is provided between the lower casing and the valve main body, and in which the thermal flowmeter has a coupling part that couples the second flow passage to a first flow passage.

Flow rate adjustment apparatus

There is provided a differential pressure type flowmeter that includes an orifice provided in a main flow channel, a first pressure sensor configured to detect pressure of fluid on an upstream side of the orifice, a second pressure sensor configured to detect pressure of fluid on a downstream side of the orifice, a first pressure introduction flow channel configured to guide the fluid on the upstream side of the orifice to the first pressure sensor, and a second pressure introduction flow channel configured to guide the fluid on the downstream side of the orifice to the second pressure sensor, wherein a flow channel length and a flow channel diameter of the first pressure introduction flow channel coincide with those of the second pressure introduction flow channel, respectively, and a ratio of the flow channel length to the flow channel diameter is not less than 20 times and not more than 30 times.

Differential pressure type flowmeter and flow controller provided with the same

The flow rate adjusting device includes: a valve body disposed so as to open and close the fluid passage; a dial operation part which adjusts minute opening of the valve body in the slow-leaking mechanism; a lock nut part which fixes the adjusting position of the minute opening; and a lock cap which prevents motion of the dial operation part and the lock nut part. The lock cap includes: a first insertion hole into which the substantially cylindrical dial operation part is inserted; a second insertion hole into which a rod protruding upward from the housing is inserted; and an arm part which connects the first insertion hole and the second insertion hole.

Flow rate adjusting device

To provide a pneumatic control valve including: a valve body; a valve opening/closing mechanism section; a pneumatic control sectionfor the valve opening/closing mechanismthat is coupled to the valve elementvia a piston stem; a diaphragmthat defines a partition between a fluid and the pneumatic control section; a cylindrical lower stopperthat is fixed to the valve bodyas anti-falling off for the valve elementand the diaphragminserted into a valve chamber, and supports movement of the piston stem; and a cylindrical upper stopperthat is fixed to the valve bodyas anti-falling off for the piston steminserted into a piston chamber, and supports movement of the piston stem

Pneumatic control valve and assembling method thereof

A flow control device is capable of performing accurate flow control over a wide range of temperatures by using a housing made of resin with superior chemical resistance. The flow control device includes: a housing made of resin; a diaphragm which is supported in the housing so as to split the housing into a gas chamber side to which gas is introduced and a fluid chamber side through which fluid passes, and is activated by the differential pressure between the gas chamber side and the fluid chamber side; and a valve body which operates in integration with the diaphragm to regulate the flow of the fluid introduced into the fluid chamber side. The gas chamber side includes a holding member which holds the diaphragm between itself and an opposing surface of the fluid chamber side opposite to the diaphragm, the holding member being screwed to the inner peripheral wall of the gas chamber side through a screw part.

Flow control device

A flow control device is capable of performing accurate flow control over a wide pressure range. The flow control device includes: a housing; a diaphragm splitting the housing into a gas chamber side to which gas is introduced and a fluid chamber side through which fluid passes, and being activated by the differential pressure generated between the gas chamber side and the fluid chamber side; and a valve body which operates in integration with the diaphragm to regulate the flow of the fluid introduced to the fluid chamber side. The diaphragm includes: a base part provided in a substantially central part of the diaphragm; and a thin film part provided on the outer rim of the base part. An opposing surface which is provided on the fluid chamber side to oppose the diaphragm includes a retaining form which retains the shape of the thin film part deformed by the differential pressure.

A fluidic device unit structure in which a plurality of fluidic devices are integrated and which is effective in reducing a footprint is provided. With a fluidic device unit structure in which a plurality of fluid devices that are connected via channels are integrated in a base member, the base member includes a plurality of mounting surfaces on which the fluidic devices are mounted and inclined channels for connecting the mounting surfaces in the interior of the base member.

Fluidic device unit structure

A fluid apparatus unit structure is provided that can be applied to a use in which a chemical fluid is removed as necessary while chemical fluid circulation and water circulation are being carried out, a fluid such as a chemical fluid does not readily solidify therein, and the fluid apparatus unit structure is compact. In the fluid apparatus unit structure (FU) that groups together and integrates plural fluid apparatus components that are connected via a flow path into a base member (), a linked flow path (), which links an adjacent air pressure control valve (A) and a manual control valve (A) that form a first chemical fluid discharge path that carries out chemical fluid circulation, is offset from the axial center of the fluid apparatus components.

Fluid apparatus unit structure

Provided is a fluid device unit structure in which a chemical solution stagnation portion that is formed between a valve of a main fluid flow path and a branching point of a return flow path is minimized to cause hardly any solidification of a chemical solution. In the fluid device unit structure in which a plurality of fluid devices that are connected via flow paths are integrated on a base member () to form a single unit, and the main fluid flow path () and the return flow path () formed in the base member () are respectively provided with a first valve () and a second valve () for switching the flow paths, the branching inlet () at which the return flow path () branches from the main fluid flow path () is close to the upstream side of the first valve ().

Fluid device unit structure

A pressure sensor having a structure in which compressible fluid is prevented from stagnating in the vicinity of a pressure-receiving surface of the pressure sensor in the interior of a pressure introducing portion is provided. In a pressure sensor including a sensor body arranged in a pressure introduction flow channel branched in a T-shape upward from a primary fluid flow channel in which fluid to be subjected to pressure measurement flows, the pressure introduction flow channel includes an inclined surface extending in a direction to increase an opening area on the side of an inlet port of the fluid on a wall surface on the downstream side in terms of the direction of flow of the fluid.

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Gyoda, Japan

Hiroki Igarashi