Ricoh Company, Ltd.

Hirokazu Yanai

Junichi Konishi

A disclosed identification method of identifying a data point distribution area on a coordinate plane includes dividing an area on the coordinate plane into divided areas so that the divided areas radiate from a division center point; selecting, in each of the divided areas, from among the data points in the divided area, a data point having the greatest distance from the division center point as a representative point; determining whether there is an overlapping area where a distribution representative point area overlaps a determination area; and determining, when there is the overlapping area, that the data group to be determined is a relevant data group.

Identification method of data point distribution area on coordinate plane and recording medium

A disclosed method of identifying a data point distribution area having data points on a coordinate plane includes dividing a coordinate plane area into plural divided areas using lines; in each divided area, selecting outermost data point data as representative points, and connecting the selected representative points to define a distribution area; comparing the area with a reference area to determine an overlapping area; and determining that the distribution area is a relevant area based on the existence of the overlapping area.

Disclosed is a method for drawing a distribution area of data points on a coordinate plane. The method includes a step in which a data point is selected as a first representative point; a step in which the data point corresponding to a direction in which a minimum angle is formed with respect to a first direction in a rotation direction is selected as a second representative point; a step in which the data point corresponding to a direction in which a minimum angle is formed with respect to a next direction in the rotation direction is selected as a next representative point, the step repeatedly selecting the next representative point; and a step in which the representative points are connected by a line to draw a distribution area indication line.

Method and program for drawing distribution area of data points on coordinate plane

A disclosed identification method of identifying a data point distribution area on a coordinate plane includes selecting a data point as a first representative point, setting the first representative point as an initial reference point, setting a direction passing through the initial reference point as an initial representative point selection direction, selecting an initial data point direction having a smallest angle relative to the initial representative point selection direction in a predetermined rotation direction when viewed from the initial representative point selection direction, selecting a data point corresponding to the initial data point direction as a second representative point of the data point distribution area, and determining whether there is an overlapping area where a distribution representative point area overlaps a determination area.

A chip quality determination method includes the steps of (a) determining the continuity of defective chips in at least four directions of an X-axis and a Y-axis on a wafer based on the wafer test result of determining the acceptability of chips arranged in a matrix in the four directions on the wafer, and dividing the defective chips into one or more defective groups so that successive ones of the defective chips are in the same defective group; (b) calculating a quality determination index of each of one or more determination target wafer periphery neighboring chips among wafer periphery neighboring chips located within a predetermined range from the periphery of the wafer based on the distance from a corresponding one of the defective groups; and (c) determining the quality of the determination target wafer periphery neighboring chips by comparing the quality determination indexes thereof with a preset threshold.

Chip quality determination method and marking mechanism using same

An object detecting method includes dividing a standard pattern into two or more areas radially from a central point; selecting, in each divided area of the standard pattern, a standard pattern pixel position at the maximum distance from the area dividing central point as a standard pattern representative point; dividing a determined pattern into two or more areas; selecting, in each divided area of the determine pattern, a determined pattern pixel position at the maximum distance from the area dividing central point as a determined pattern representative point; determining a positional difference between the standard pattern representative point and the determined pattern representative point in the corresponding divided areas; and determining the determined pattern as a target object when the positional differences in all of the divided areas are within a predetermined range.

Object detecting method and non-transitory computer-readable recording medium storing an object detection program

In a disclosed good chip classifying method capable of classifying the good chips on a wafer, defective chips are divided into defective groups so that the defective chips contiguous to each other are placed into the same defective group based on the wafer test results; the defective group is judged as a defective chip concentrated distribution area when the number of the defective chips exceeds the prescribed value; a defective chip concentrated distribution nearby area including all the defective chips in the defective chip concentrated distribution area and nearby good chips is formed; and the good chips in the defective chip concentrated distribution nearby area are classified to have a chip index based on four directions (X and Y axis directions) on which the defective chips in the defective chip concentrated distribution area are disposed.

Good chip classifying method on wafer, and chip quality judging method, marking mechanism, and manufacturing method of semiconductor device using the good chip classifying method

Growing community of inventors

Osaka, Japan

Hirokazu Yanai