Nuflare Technology, Inc.

Ntt Advanced Technology Corporation

Hirokazu Yamada

Hiroshi Matsumoto

Munehiro Ogasawara

Katsuyuki Machida

Ryoichi Yoshikawa

Hirofumi Morita

Kazuhiro Chiba

Takaaki Matsushima

Kazuhisa Kudo

Masaki Yano

Teruaki Safu

Toshifumi Konishi

A method for fabricating a blanking aperture array device for multi-beams includes forming, using a substrate over which a first insulating film, a first metal film, a second insulating film, and a second metal film are laminated in order, electrodes and pads on the second metal film, removing a part of the second metal film, removing the second insulating film using, as a mask, the electrodes, the pads, and a remaining part of the second metal film, and forming openings each being between a pair of electrodes, wherein, a part of the second metal film is etched such that some part of it remains in regions each connecting one of the electrodes and one of the pads, and a region in which entire openings are formed except the openings themselves is configured by the electrodes, pads, and first and second metal films such that the insulating film is not exposed.

Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams

Growing community of inventors

Mishima, Japan

Hirokazu Yamada