Nippon Mektron Limited

Hirokazu Ohdate

Masayuki Iwase

Ryoichi Toyoshima

Keizo Toyama

Kazuyuki Ozaki

Taisuke Kimura

This invention provides a pressure sensitive element capable of suppressing dispersion in the initial load for pressure sensing among the sensor electrodes or among the pressure sensors. The pressure sensitive element has a support substrate, a sensor electrode, a pressure sensing film and an insulating layer. The pressure sensing film is arranged opposing to the sensor electrode. The insulating layer has an opening and is provided between the support substrate and the pressure sensing film. At least a part of an opening edge of the opening is fallen on the sensor electrode. An exposed part as a part of the sensor electrode is exposed inside the opening, while leaving a buried part as the other part of the sensor electrode buried under the insulating layer.

Pressure sensor capable of suppressing dispersion in the initial load of pressure

Provided is a pressure sensing element configured to be flexible, and capable of demonstrating a stable electrical reliability over a long period; and, a pressure sensor having such pressure sensing element. A pressure sensing element () has an electro-conductive pressure sensing film (), a sensor electrode () provided at a position faced to the pressure sensing film (), and an insulating layer () which creates a predetermined distance 'A' between the pressure sensing film () and the sensor electrode () so as to keep them apart from each other, the pressure sensing film () being a resin film containing carbon particles (); and, a pressure sensor () has the pressure sensing element (), and a detection unit () which is electrically connected with the pressure sensing element () so as to detect contact resistance between the pressure sensing film () and the sensor electrode ().

Pressure sensing element and pressure sensor

A pressure sensing element () includes a support substrate (); a sensor electrode () supported by the support substrate (); a pressure sensing film () functionalized to be electro-conductive, at least in a portion thereof faced to the sensor electrode (); and an insulating layer () which keeps the sensor electrode () and the pressure sensing film () apart from each other by a predetermined distance A, and has formed therein an opening () in which the sensor electrode () is exposed to the pressure sensing film (), the insulating layer () having an aperture wall () which partitions the opening (), and an aperture end (top aperture end ()) faced to the pressure sensing film (), and the insulating layer () being increased in height, measured from the support substrate (), continuously towards the opening ().

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Tokyo, Japan

Hirokazu Ohdate