Komatsu Corporation

Gigaphoton Inc.

Hirokazu Kubo

Toru Suzuki

Tatsuo Enami

Osamu Wakabayashi

Masato Moriya

Shinji Nagai

Takeshi Ohta

Masashi Shinbori

In a wavelength detecting apparatus using an etalon, a drift in wavelength measurement by the etalon is stabilized and an adverse influence of out gas is eliminated, so that correct wavelength measurement is realized. The wavelength detecting apparatus includes a housing equipped with a port for use of introducing replacement gas, an etalon set inside the housing, and a moisture-absorbing unit for absorbing at least moisture released inside the housing.

Wavelength detecting apparatus, laser apparatus, and wavelength detecting method

The present invention can accurately detect a wavelength of a light to be detected, which is output from a source of light to be detected, without an error even if there is a change in the characteristic of a spectroscope due to an individual difference among the spectroscopes or a change in the measuring environment. The device according to the invention emits at least two reference lights (Ln, La) having different wavelengths (&lgr;n, &lgr;a) as the reference lights by reference light source. And, actual characteristic value (D) of spectroscope is calculated on the basis of detection positions (Sn, Sa) of the at least two reference lights (Ln, La) on a sensor and the known wavelengths (&lgr;n, &lgr;a) of the at least two reference lights (Ln, La) (D&equals;(&lgr;a&minus;&lgr;n)/(Sa&minus;Sn)). And, on the basis of the detection positions (Sn, SO) of the reference light (Ln) and the light to be detected (LO) on the sensor (,), the calculated actual characteristic value (D) of the spectroscope and the known wavelength (&lgr;n) of the reference light (Ln), wavelength (&lgr;O) of the light to be detected (LO) is calculated (&lgr;O&equals;&lgr;n&plus;(SO&minus;Sn)&middot;D).

Wavelength detector

Growing community of inventors

Oyama, Japan

Hirokazu Kubo