Thk Co., Ltd.

Other

Oki Electric Industry Co., Ltd.

Oki Semiconductor Co., Ltd.

Beldex Corporation

Thk Intechs Co., Ltd.

Hirokazu Ishikawa

Hirohisa Masuda

Takeki Shirai

Masashi Konomoto

Tadashi Hirokawa

Gyo Shimotoyodome

Yoshikazu Suga

Shunji Matsutomi

Hiroshi Teramachi

Kaoru Hoshide

Takashi Ogata

Jun Sakamoto

Shigeru Wako

Toshio Hayashi

Tsutomu Hasegawa

Mitsuteru Nanba

Yoichi Nakazato

Fujio Tateda

Hideo Oka

A rotary table system having high axial and radial run-out accuracy, high resolution, and thin and medium- or large-sized system. The rotary table system includes a guide apparatus and a rotary table mounted on the guide apparatus. The guide apparatus includes a ring-shaped integrated rail having no discontinuity in the travel direction thereof, and a plurality of guide blocks assembled to the rail from the direction of their surfaces opposing the rail. The surface of the rail opposite to the surface thereof opposing the guide blocks and the underside of the rotary table are joined together. The rail has an L-shaped cross-sectional configuration formed from a vertical portion and a horizontal portion extending from the upper end of the vertical portion in the radial direction of the rotary table. A tape scale that is detected by a detecting mechanism is provided on the outer peripheral surface of the rail.

Rotary table system

A unit cell for an integrated circuit includes a first conductive type active region and a second conductive type active region which extend in a first direction. Each of the active regions has first and second ends. The first end of the second conductive type active region opposes the second end of the first conductive type active region. A poly-silicon pattern extends in the first direction across the first conductive type active region and second conductive type active region. A first contact region is adjacent the first end of the first conductive type active region in the first direction. A second contact region is adjacent the second end of the second conductive type active region in the first direction.

Cell based integrated circuit and unit cell architecture therefor

In a unit cell, a first conductive type active region and a second conductive type active region are provided. Those two active regions extend in a first direction. Each of the active regions have first and second ends thereof. The first end of the second conductive type active region opposes the second end of the first conductive type active region. A conductive pattern is provided to extend in the first direction across the first conductive type active region and the second conductive type active region. A first contact region is arranged adjacent the first end of the first conductive type active region in the first direction. A second contact region is arranged adjacent the second end of the second conductive type active region in the first direction.

A guide apparatus has a standard end plate split into a pair of split parts that can be positioned with respect to each other with high accuracy and firmly secured to each axial end of a moving block body without fear of displacement during use. The guide apparatus has a moving block relatively movably attached to a track rail. The moving block body has in a section perpendicular to the axial direction a geometry that allows the moving block body to be assembled to the track rail at an intermediate part of the track rail. The end plate consists essentially of a pair of split parts that are splittable to right and left in the width direction of the end plate. One split part has a positioning pin projecting from a parting surface thereof. A positioning hole fittable with the positioning pin is provided in a parting surface of the other split part. The positioning pin is fitted into the positioning hole to form an end plate assembly. The end plate assembly is secured to one end of the moving block body in the direction of relative movement by using securing screws passed through securing screw holes provided in the split parts, respectively.

Guide apparatus

An angle adjusting device includes a pedestal, a pair of guide members having an arcuate track, an oscillation body moved along the track of the guide members, and a moving member for moving the oscillation body to adjust the angular position of the oscillation body around an oscillation axis. The moving member has a motor provided in the pedestal, a linkage shaft provided in the oscillation body, and a linkage mechanism interposed between the motor and the linkage shaft. A principal linkage member of the linkage mechanism is linked to a top end portion of an output shaft rotatably around an axis parallel to the oscillation axis, and linked to the linkage shaft to be linearly movable in its axial direction. The guide members have two flat reference planes, and fixed in a state where those reference planes are contact with two flat setting planes of the pedestal.

Angle adjusting device

In a unit cell, a first conductive type active region and a second conductive type active region are provided. Those two active regions extend in a first direction. Each of the active regions has first and second ends thereof. The first end of the second conductive type active region opposes the second end of the first conductive type active region. A poly-silicon pattern is provided to extend in the first direction across the first conductive type active region and second conductive type active region. A first contact region is arranged adjacent the first end of the first conductive type active region in the first direction. A second contact region is arranged adjacent the second end of the second conductive type active region in the first direction.

A scribing device for forming a scribe line on a work comprises a vibration generator for generating vibration, a cutter for cutting a work by utilizing vibration thereof, a shaft extending vertically from the vibration generator so as to transmit the vibration of the vibration generator to the cutter, a guide unit for guiding a linear motion of the shaft in a central axis direction thereof, and a load adjusting mechanism for adjusting a load applied to the work from the cutter, the load adjusting mechanism being operated by magnetic force. According to such scribing device, the guide unit guides a vertical moving (rising) motion of the shaft by the load adjusting mechanism and guides the vibration of the shaft caused by the vibration generated by the vibration generator.

Scribing device

A holder is rotatably connected to a body . A scribe tool is attached to one end of the holder . A plate spring is fixed to the body , and a receiving plate is fixed to the holder . A piezo-actuator is interposed between the plate spring and the receiving plate . One end of a plate spring having a small spring constant is fixed to the holder . The body is provided with an adjustment screw . When a lower end part of the adjustment screw is protruded, the lower end part presses the plate spring for flexure, thereby generating a resilient force to the plate spring . By this, a rotational force is given to the holder and thus a pressing load directing toward a workpiece is given to the scribe tool

Scribe device

A scribing apparatus which forms a scribe line on a work comprises a scribe body having a cutter put on the work and a vibration generation member which vibrates the cutter in a direction perpendicular to the work periodically, a support device having a support body for supporting the scribe body to be movable, and magnetic force applying means for holding the scribe body at a standard height in the direction by using magnetic force. The magnetic force applying means includes a pair of magnets and a pair of magnets repulsing each other in a direction parallel to a direction in which the vibration generation member vibrates. And magnetically repelling force applied to the scribe body by said first pair of magnets and magnetically repelling force applied to the scribe body by said second pair of magnets oppose to each other.

Scribing apparatus

A method of forming a scribe line on a work surface is carried out by a scribing apparatus comprising a scribe body including an abutment member, such as cutter provided with an penetrator, having at least first and second ridgelines and a sharp tip end portion and a vibration generating member for periodically applying vibrations to the abutment member. A vibration is applied to the abutment member with the tip end portion thereof abutting against the work surface, and the scribe body is relatively moved along the work surface to thereby form a scribe line on the work surface. In this scribing method, a first angle constituted by the first ridgeline of the abutment member and the work surface and a second angle constituted by the second ridgeline thereof and the work surface are made different from each other and the first and second ridgelines are opposed in the moving direction of the scribe body.

Scribing method

Three dimensional guide

Three-dimensional guiding apparatus

A linear motion apparatus comprises a linear track rail having a roller running groove; a feeding threaded shaft rotatably arranged in parallel with the track rail; and a movable block arranged on the track rail through rollers, and provided with a nut portion having a threaded bore into which the feeding threaded shaft is to be screwed. The movable block comprises (i) a block body having a roller running counter-groove which faces on the roller running groove of the track rail and a roller returning passage and (ii) direction changing passage forming members respectively provided on both ends of the block body, each of which members forms a U-shaped direction changing passage connecting the roller running counter-groove and the roller returning passage to each other. The movable block is linearly moved on the track rail through the rollers by rotating the feeding threaded shaft. The nut portion is integrally formed on the direction changing passage forming member, and a position of a center axis of the threaded bore of the nut portion is determined by the direction changing passage forming member on a basis of a position of the roller running counter-groove.

Growing community of inventors

Tokyo, Japan

Hirokazu Ishikawa