Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Canon Anelva Corporation (1 from 356 patents)
1 patent:
1. 8536539 - Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generator