Hitachi-high-technologies Corporation

Hirohisa Enomoto

Wataru Suzuki

Shinya Kitayama

Provided is a charged particle beam device in which a support body is rigid enough to support a sample chamber while the vibration of the support body is reduced even under the action of a disturbance such as environmental sound, the degree of parallelism of the support body is maintained, and increase in weight of the support body is suppressed. The support body includes: a first member which supports a mounted object, and is supported by a vibration removing mount; second members which have a thickness different from that of the first member and arranged to overlap the first member; fixing members which fix the first member and the second members; and damping members which have rigidity lower than the fixing members and are deformed by a difference in variations between the first member and the second members.

Charged particle beam device

A charged particle device includes a cylindrical column (), a charged particle beam optical system disposed in the column; a sample stage () disposed on the column, and a support device () supporting the column. The support device includes a simply supported structure that simply supports the column at a plurality of support points set along an axial line direction of the column. The support points for the column are disposed at positions corresponding to the positions of nodes of vibration of the column. In this way, the rigidity of the column can be increased without increasing the weight of the column itself, whereby vibrations acting on the column can be decreased.

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Tokyo, Japan

Hirohisa Enomoto