Average Co-Inventor Count = 2.57
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Ebara Corporation (3 from 2,514 patents)
3 patents:
1. 11396714 - Treatment device, plating apparatus including the same, conveying device, and treatment method
2. D845568 - Pad holder for polishing apparatus
3. D777546 - Work holder for polishing apparatus