Other

Futaba Corporation

Tokai Carbon Company, Ltd.

Ferrotec Corporation

Daiken Chemical Co., Ltd.

Takikawa, Hirofumi

Hirofumi Takikawa

Shigeo Itoh

Yoshihiko Hibi

Akio Harada

Yuichi Shiina

Youhei Fujimura

Akira Kondo

Tomonori Tahara

Kazuo Yoshikawa

Yoshimi Nishimura

Mitsukuni Ikeda

Yuichi Ferrotec Corporation Shiina

A plasma generator for forming a thin film comprises a cathode () for supplying constituent particles of an arc plasma and a trigger-and-anode () for starting and sustaining the arc plasma. The cathode surface () of the cathode () is flat or finely irregular, and the anode surface () of the trigger-and-anode () brought into contact with the cathode surface () is flat. The anode surface () is so arranged as to be brought into contact with the whole cathode surface () when plasma is started. The contact point between a fine projection end () of the cathode surface () and the anode surface () is made a plasma emission point. When the projection is consumed by plasma emission, another projection end which can be brought into contact with the anode surface () is used as another plasma emission point, thus enabling intermittent operation of persistently repeating the sequence operation.

Plasma generator

A hollow carbon nanoballoon structure having a relatively large closed space, and a method of producing a carbon nanoballoon structure capable of easily and stably producing such a structure. The carbon nanoballoon structure is obtained by heating soot prepared by an arc discharge using carbon electrodes, soot prepared by vaporizing carbon by laser irradiation, or carbon black having a specific surface area of 1000 m2/g or more and a primary particle diameter of 20 nm or more at a high temperature in an inert gas atmosphere, and includes graphite sheets linked to form a curved surface.

Carbon nanoballoon structure and method for preparation thereof, and electron emitter

A power supply circuit for plasma generation by which a large quantity of generated plasma can be smoothly obtained without increasing the sizes of an apparatus. An electric discharge generating electrode is composed of two or more first electrodes and one or more second electrodes. An LC series circuit is provided by connecting a capacitor C and a coil L in series between one of outputs of an alternating high voltage generating circuit which generates an alternating high voltage to be applied between the electrodes of electric discharge generating electrode, and the first electrode. When electricity is discharged in one of the electrode pair, voltage drop is suppressed by the coil, and since electric discharge from the other electrode pair is induced without being disturbed, a large quantity of plasma can be smoothly generated by common use of the alternating high voltage generating circuit.

Power supply circuit for plasma generation, plasma generating apparatus, plasma processing apparatus and plasma processed object

A carbon substance comprises a structure and line-shaped bodies, the structure having a size ranging from about 1 &#x3bc;m to about 100 &#x3bc;m and including carbon and a metal or a metallic oxide, and the line-shaped bodies having diameters smaller than about 200 nm and including carbon as a main component thereof and growing radially from a surface of the structure. A method for manufacturing the carbon substance uses a thermal decomposition of a source gas containing carbon in the vicinity of a catalyst, wherein the catalyst comprises a first and a second materials, the first material being Ni or a Ni oxide and the second material being In or an In oxide; and the thermal decomposition is performed at a temperature ranging from about 675&#xb0; C. to about 750&#xb0; C. An electron emission element uses the carbon substance as an electron emission material. A composite material includes the carbon substance in its matrix.

Carbon substance and method for manufacturing the same, electron emission element and composite materials

A graphite cathode and a graphite anode are placed opposite each other through an insulating plate having a notch. A voltage is applied between both of the electrodes to generate arc discharge at the notch of the insulating plate. A given area of the graphite anode is evaporated from an electrode point of the arc discharge, and simultaneously an arc jet is generated from the notch. Thereby, a carbon nanoparticle comprising soot of carbon nanomaterial containing carbon nanohorn is generated. The soot is deposited on a recovering plate for recovery.

Method for preparing carbon nano-fine particle, apparatus for preparing the same and mono-layer carbon nanotube

A carbon nano-fiber, particularly twisted carbon nano-fiber such as a carbon nano-coil, carbon nano-twist, carbon nano-rope is produced by means of a catalyst CVD method using carbon-containing gas as a raw material and a catalyst comprising one or plural components selected from the group consisting of Cr, Mn, Fe, Co, Ni and oxide thereof and one or plural components selected from the group consisting of Cu, Al, Si, Ti, V, Nb, Mo, Hf, Ta, W and oxide thereof is used.

Method for preparing nano-carbon fiber and nano-carbon fiber

Described herein is a method of preparing nano-carbon; a method of preparing an electron emitting source by supporting the soot; and an apparatus for preparing the same. A torch electrode of an arc torch as a first electrode is placed opposite to a material to be arced using graphite as a second electrode. A voltage is applied between the torch electrode and an edge portion of the material to be arced to generate are discharge, to evaporate the edge portion of the material to be arced exposed to the arc discharge, to generate soot. The soot thus generated is deposited on the surface of a substrate opposite to an arc discharge-generating area through a mask having a patterned opening.

Nano-carbon and composite material or mixed material containing nano-carbon and metal fine particle and methods for producing and patterning the same

A method of instantaneously forming a surface of an arc-treated material mainly including graphite into nano-tubes due to arc discharge carried out using a unit like a welding arc torch or the like without necessarily requiring a processing container, resulting in the nano-tube being applied to an electron emission source. A torch electrode acting as a first electrode and the arc-treated material made of graphite and acting as a second electrode are arranged opposite to each other. A potential is applied between both electrodes to generate arc discharge therebetween. A mask having an opening pattern is arranged on the arc-treated material, so that only graphite positioned on portions of a surface of the arc-treated material corresponding to openings of the mask are exposed to arc, to thereby be formed into nano-tubes.

METHOD FOR MANUFACTURING NANO-TUBE, NANO-TUBE MANUFACTURED THEREBY, APPARATUS FOR MANUFACTURING NANO-TUBE, METHOD FOR PATTERNING NANO-TUBE, NANO-TUBE MATERIAL PATTERNED THEREBY, AND ELECTRON EMISSION SOURCE

Growing community of inventors

Toyohashi-shi Aichi, Japan

Hirofumi Takikawa