Mitsui Chemicals, Inc.

Shin-etsu Chemical Co., Ltd.

Yasuhiro Koike

Hirofumi Io

Tadahiro Sunaga

Yoshihiro Yamamoto

Takashi Ochiai

Takeshi Kinsho

Takeru Watanabe

Tomohiro Kobayashi

Keiichi Ikeda

Takashi Nakano

Yuichi Okawa

Tetsuya Hamada

Takashi Oda

Kazumori Kawamura

Keisuke Kawashima

Hiroshi Kouno

Shigeto Shigematsu

Tomoyuki Morita

Ritsuko Shibahara

Disclosed is an optical material including a cyclic olefin copolymer containing at least a repeating structural unit [A] represented by the general formula (1) and a repeating structural unit [B] represented by the general formula (2) and having a molar ratio [A]/[B] of from 95/5 to 1/99, wherein the absolute value of the ratio &#x394;OB/&#x394;F is from 0.001 to 0.250 in which &#x394;OB represents the amount of a change in the absolute value of the orientation birefringence calculated from the phase difference (nm) at a wavelength of 633 nm/film thickness (&#x3bc;m) in a stretched film obtained from the optical material, and &#x394;F represents the amount of a change in the absolute value of the orientation coefficient determined from the dichroic ratio of parallel light intensity Ito perpendicular light intensity I, each relative to the orientation direction according to Raman spectroscopy. 

Optical material and molded product thereof

A polymer having a rate of dissolution in an alkaline developer that increases under the action of acid is provided. The polymer is prepared by reacting a hydrogenated ROMP polymer with an O-alkylating agent in the presence of a base.

Polymer, polymer preparation method, resist composition and patterning process

The present invention is to provide a fluorine-containing polymer having excellent light transmission in the vacuum ultraviolet region of not more than 193 nm, a monomer favorably used for preparing the fluorine-containing polymer, a process for preparing the fluorine-containing polymer, and uses of the fluorine-containing polymer. The fluorine-containing polymer has at least a repeated unit structure represented by the following formula (1) and has an absorption coefficient of not more than 3.0 &#x3bc;mat 157 nm of ultraviolet rays.wherein Rto Rare each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, or the like; Xis &#x2014;CRR&#x2014;, &#x2014;NR&#x2014; or &#x2014;PR&#x2014; (Rand Rare each fluorine, a fluorine-containing alkyl group of 1 to 20 carbon atoms, hydrogen, &#x2014;O&#x2014;, &#x2014;S&#x2014;, an alkyl group of 1 to 20 carbon atoms, or the like); at least one of Rto Rand Xis fluorine or a fluorine-containing group; and n is 0 or an integer of 1 to 3.

Fluorinated cycloolefin polymers, processes for preparation of fluorinated cycloofefin monomers and polymers thereof, and use of the same

Hydrogenated ring-opening metathesis copolymer and process for producing the same

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Sodegaura, Japan

Hirofumi Io