Canon Kabushiki Kaisha

Hirofumi Fujii

Mitsuo Nishimura

Hiroshi Ito

Mitsuru Inoue

Michio Yanagisawa

A microscope includes an illumination system, a stage, and an objective lens that forms an image of a specimen. The stage includes a fixed member whose position and inclination are fixed, a specimen holding member at least one of whose position and inclination is changeable, and a supporting member that supports the specimen holding member. A connection between the supporting member and the specimen holding member and a connection between the supporting member and the fixed member reside near sides of the specimen holding member. The microscope further includes an actuator that changes at least one of the position and the inclination of the specimen holding member with respect to the fixed member, and a buffer mechanism that suppresses transmission of any changes in the inclination of the specimen holding member to the actuator. The actuator and the specimen holding member are connected with the buffer mechanism interposed therebetween.

Microscope

A method of forming a container having a lid and a container body which define an inside space, and a material containing an organic compound provided in the inside space. The method includes forming a groove and a communication member for communicating the groove with an outside space, in at least one of the lid and the container body, providing the material in the inside space, welding the lid and the container body to each other, and exhausting the organic compound vaporized by welding heat to the outside space through the groove and the communication member.

Container and exposure apparatus having the same

An exposure apparatus including a projection optical system and configured to expose a substrate to light via the projection optical system includes a support configured to support the projection optical system, an object supported by the support and movable relative the support, an actuator configured to drive the object, a detector configured to detect a relative position between the object and the support, and a controller configured to perform a control of the actuator based on an output of the detector to cause the object to follow the support. The controller is configured to perform an estimation of a vibration of the support based on an output of the detector in parallel with the control to cause the object to follow the support.

Exposure apparatus and device manufacturing method

A container including at least two structural members welded to each other to define an inside space, and a material containing an organic compound provided in the inside space, in which in at least one structural member of the at least two structural members has (i) a groove formed between a welded portion thereof and the material in order to release the organic compound, as the organic compound is vaporized when the structural members are welded to each other, and (ii) a communication member to communicate the groove and an outside space of the container with each other, so that the vaporized organic compound is exhausted to the outside space.

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Utsunomiya, Japan

Hirofumi Fujii