Nippondenso Co., Ltd.

Kabushiki Kaisha Toyota Chuo Kenkyusho

Hirofumi Abe

Yasunori Taga

Makio Iida

Yoshihiko Isobe

Makoto Ohkawa

Takeshi Ohwaki

Hideya Yamadera

Tadashi Shibata

A fuse fusible type semiconductor device capable of reducing energy required for fusing and a production method of the semiconductor device. In a semiconductor device equipped with a heat-fusible thin film resistor, the thin film resistor formed on a substrate 1 through an insulating film 2 is made of chromium, silicon and tungsten, and films 7 and 8 of a insulator including silicon laminated on the upper surface of the fusing surface, aluminum films 5 are disposed on both sides of the fusing surface and a barrier film 4. This semiconductor device is produced by a lamination step of sequentially forming a first insulating film 2, a thin film resistor 3, a barrier film 4 and an aluminum film 5 on a substrate 1 for reducing drastically fusing energy, an etching step of removing the barrier film 4 and the aluminum film 5 from the fusing region 31 of the thin film resistor 3, and an oxide film formation step of depositing the insulator including silicon films 7 and 8.

Semiconductor device equipped with a heat-fusible thin film resistor and

A programmable semiconductor memory cell is provided; which secures a sufficient output signal voltage margin and which also has reduced current dissipation and improved durability. To program the programmable semiconductor memory cell of this invention, a high write potential is applied to the high-level lead of a fuse and a selector transistor is turned on to blow the fuse. When reading the memory cell, high read potential is applied to the high-level lead of the fuse. Because an emitter and base of an output transistor are connected to both leads of the fuse, the output transistor is turned on when the fuse is blown and is turned off when the fuse is not blown. The output transistor outputs an amplified signal voltage to an output line.

Semiconductor programmable read only memory device

Growing community of inventors

Okazaki, Japan

Hirofumi Abe