Komatsu Corporation

Sumco Techxiv Kabushiki Kaisha

Hirobumi Miwa

Yukinori Matsumura

Yasunori Ohkura

Tomikazu Tanuki

Koutarou Hori

Tadashi Taninaga

Ichio Ichikawa

Takahiro Yoshimura

Mitsuo Terada

Kotaro Hori

Kouzou Matsusita

Kiyoharu Miyakawa

Masakazu Kawakita

Akira Nisi

To predict the service life of a construction machine more accurately, and to make it possible to draw up an appropriate overhaul implementation plan at an early stage. A first service life prediction unitpredicts the service lives of main components such as an engine and the like, based upon their actual wear states. And a second service life prediction unitpredicts the service lives of the same components, based upon their cumulative load amounts. An order setting unitselects the ones of these two predicted service lives which are the shorter, and sets a priority order for overhaul in order of shortness of predicted service life. An overhaul schedule table generation unitcreates a schedule table Dbased upon this priority order. The contents of this schedule table Dare decided upon by a judgment unit, and, if necessary, are corrected by a correction unit. And a plan creation unitcreates an overhaul implementation plan document Dand the like, based upon the corrected schedule table D. The result of the overhaul task and the present states of components are tested, and these test results are reflected by the service life prediction unitsand

System for construction machine maintenance based on predicted service life

A maintenance support system for a construction machine calculates the cumulative load of every component corresponding with the driving and working conditions of the construction machine by a load calculation means after simulating the driving and working conditions on the basis of production operating conditions by an operation simulation means, and forecasts the lifespan of the respective components by a lifespan calculation means on the basis of the cumulative load. Hence, a more accurate maintenance schedule can be established in comparison with a case where which component is to be maintained is determined on the basis of only the operating time.

Maintenance support system for construction machine

It is possible to inspect scratches and staining on a wafer surface on the basis of an LPD map obtained from a particle counter, by providing a meansfor detecting aggregation of clustered point defects (LPD) from two-dimensional distribution informationfor such fine LPD on the surface of a silicon wafer, and an improvement in the inspection efficiency and the precision of judgements of 'defective' status can be achieved. Furthermore, the system is devised so that the trend of generation of scratches and staining in a specified process can easily be detected by accumulating wafer surface information such as scratch information, staining information and the like for the wafer surface detected by a wafer surface inspection device(especially as image information or numerical information), and superposing sets of information thus accumulated. Plans for improving processes can be made by both the wafer supplier and wafer consumer by sharing such information with both parties.

Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information on wafer surface

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Hiratsuka, Japan

Hirobumi Miwa