Kabushiki Kaisha Toshiba

Shiroki Corporation

Renesas Electronics Corporation

Hiroaki Yamazaki

Tamio Ikehashi

Yosuke Akimoto

Yoshihiko Kurui

Kei Masunishi

Yumi Hayashi

Fumitaka Ishibashi

Ping Wang

Tomohiro Saito

Naofumi Nakamura

Tomohiko Nagata

Takayuki Masunaga

Shigenobu Ohsawa

Hiroki Kudo

Shigenobu Osawa

Akihiro Kojima

Kenji Shimizu

Akira Fujimoto

Kentaro Nakajima

Etsuji Ogawa

Kohei Suzuki

Isami Mituhashi

Naoki Hiramatsu

Katsumasa Muramatsu

Nobutaka Nakaguchi

Haruka Kubo

Yuriko Kato

Manami Yata

According to one embodiment, a sensor includes a detection device, a switch circuit, and a detection circuit. The detection device includes a first detection section and a second detection section. The first detection section includes a first detection element. The first detection element includes a first conductive member and a first resistance member. The second detection section includes a second detection element. The second detection element includes a second conductive member and a second resistance member. In a first operation, the switch circuit is configured to supply a first current to the first conductive member and not to supply the first current to the second conductive member, and the detection circuit is configured to output a first signal corresponding to a difference between a first electrical resistance of the first resistance member and a second electrical resistance of the second resistance member.

Sensor and sensor system

According to one embodiment, a sensor includes a detector. The detector includes a first resistance member, a second resistance member, a third resistance member, and a conductive member. A position of the third resistance member in a first direction from the first resistance member to the second resistance member is between a position of the first resistance member in the first direction and a position of the second resistance member in the first direction. A second direction from the conductive member to the third resistance member crosses the first direction. A third electrical resistance of the third resistance member is configured to change depending on a target substance around the detector.

Sensor

According to one embodiment, a sensor includes a base, first and second detection units. The base includes first and second base regions. The first detection unit includes a first detection element including a first resistance member, a first conductive member, and a first insulating member. A part of the first insulating member is between the first resistance member and the first conductive member. A first gap is provided between the first base region and first detection element. The first detection element has a first area. The second detection unit includes a second detection element including a second resistance member, a second conductive member, and a second insulating member. A part of the second insulating member is between the second resistance member and the second conductive member. A second gap is provided between the second base region and second detection element. The second detection element has a second area.

According to one embodiment, a sensor includes a housing, a sensor portion, and a film member. The housing includes a first housing member including an opening. The first housing member includes a first inner face, and a first side face inside the opening. The sensor portion includes a sensor member including a hole, and a sensor element. A first gap is provided between the sensor element and the sensor member. The film member is porous. The film member includes an inner region and an outer region around the inner region. The outer region faces the first inner face. The sensor member is located between the sensor element and the inner region. The sensor member faces the inner region. At least a part of the inner region overlaps the first side face in a second direction crossing a first direction from the sensor element to the sensor member.

According to one embodiment, a sensor includes an element part. The element part includes a base body, a first detection support part fixed to the base body, a first detection connection part including a first connection resistance layer and supported by the first detection support part, a first support part fixed to the base body, a first structure body, a first connection part, and a film part. The first structure body includes a first end part and a first other end part. The first end part is supported by the first support part. The first connection part is supported by the first other end part. The film part includes a first detection part and a first part. The first detection part is supported by the first detection connection part. The first part is supported by the first connection part. The film part includes a film part resistance layer.

According to one embodiment, a sensor includes a base, first and second detection element portions, first to third resistor terminals, and first and second conductive terminals. The base includes first and second base regions. The first detection element portion is provided at the first base region. The first detection element portion includes a first detection dement. The first detection dement includes a first resistance member and a first conductive member. The first resistance member includes a first resistance portion and other portion. The first conductive member includes a first conductive portion and other portion. The second detection element portion is provided at the second base region. The second detection dement portion includes a second detection element. The second detection element includes a second resistance member and a second conductive member. The second resistance member includes a second resistance portion and other portion. The second conductive member includes a second conductive portion and other portion.

According to one embodiment, a sensor includes a detection device and a circuit portion. The detection device includes a first detection portion and a second detection portion. The first detection portion includes a first detection element. The first detection element includes a first conductive member and a first detection member. The second detection portion includes a second detection element. The second detection element includes a second conductive member and a second detection member. The circuit portion is configured to execute a first detection portion operation for outputting a first detection result corresponding to a first detection value based on the first detection member when a first current is supplied to the first conductive member. In a case where a first evaluation value is not within a first range, the circuit portion is configured to execute a second detection portion operation by the second detection portion.

Sensor and sensor system including multiple detection portions

According to one embodiment, a sensor includes a first element including a first resistance member and a first conductive member, a second element including a second resistance member, and a third resistance member connected in series with the second resistance member. An absolute value of a third temperature coefficient of a third resistance of the third resistance member is smaller than an absolute value of a first temperature coefficient of a first resistance of the first resistance member. The absolute value of the third temperature coefficient is smaller than an absolute value of a second temperature coefficient of the second resistance member. The third resistance is lower than the second resistance.

According to one embodiment, a sensor includes a first sensor part. The first sensor part includes a first electrode, a first counter electrode, and a first intermediate layer located between the first electrode and the first counter electrode. The first counter electrode includes a first electrode side surface. The first electrode side surface crosses a first cross direction. The first cross direction crosses a first direction from the first electrode toward the first counter electrode. The first intermediate layer includes a first intermediate layer side surface. The first intermediate layer side surface crosses the first cross direction. The first intermediate layer side surface is recessed when referenced to the first electrode side surface.

According to one embodiment, a sensor includes a sensor part including a first film, and a structure body including a second film. The first film has a first density, and a first concentration of a first element. The second film has at least one of a second density, or a second concentration of the first element. The second concentration is greater than the first concentration. The second density is greater than the first density.

Sensor and method for calibrating sensor

A sensor includes a handhole part and a sensor module. The handhole part includes an inner wall and a holder. The holder is located at the inner wall. The sensor module is provided in the handhole part. The sensor module includes a held part held by the holder, a housing connected with the held part, a sensor circuit provided in the housing and including a gas sensor element, and a battery configured to supply electrical power to the sensor circuit. A gap is between the inner wall and the housing and between the housing and a first member under the housing.

Sensor and sensor module

According to one embodiment, a MEMS element includes a first member, and an element part. The element part includes a first fixed electrode fixed to the first member, and a first movable electrode facing the first fixed electrode, a first conductive member electrically connected with the first movable electrode, and a second conductive member electrically connected with the first movable electrode. The first movable electrode is supported by the first and second conductive members to be separated from the first fixed electrode in a first state before a first electrical signal is applied between the second conductive member and the first fixed electrode. The first conductive member is separated from the first movable electrode in a second state after the first electrical signal is applied. The first movable electrode is supported by the second conductive member to be separated from the first fixed electrode in the second state.

MEMS element and electrical circuit

According to one embodiment, a sensor includes a base, and a first structure body. The base includes semiconductor dement including the first dement electrode. The first structure body includes a first conductive member and a coil. The first conductive member is electrically connected with the first element electrode. The coil is provided around the first conductive member in a first plane crossing a first direction from the base to the first structure body.

According to one embodiment, a sensor includes a handhole part, a sensor module, and a holder. The handhole part includes an inner wall. The sensor module is provided in the handhole part. The sensor module includes a housing, a sensor circuit provided in the housing, the sensor circuit including a gas sensor element, and a battery configured to supply electrical power to the sensor circuit. The holder holds the sensor module so that a gap is formed between the inner wall and the housing and between the housing and a first member under the housing.

According to one embodiment, a sensor includes a base including a first face, and a first structure body fixed to the first face. The first structure body includes first and second support portions, a first movable portion, and a first fixed electrode. The first support portion is fixed to the first surface. The second support portion is fixed to the first face and provided around the first support portion. The first movable portion is supported by the first and second support portions and apart from the base. The first fixed electrode is fixed to the first face. The first movable portion includes a first movable electrode and a first conductive member. A first current is configured to flow the first conductive member. The first fixed electrode faces the first movable electrode. A first gap is provided between the first fixed electrode and the first movable portion.

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Yokohama, Japan

Hiroaki Yamazaki