Fujitsu Corporation

Other

Hiroaki Suzuki

Akio Sugama

Naomi Kojima

Fumio Takei

Shozo Fujita

Isao Karube

Takafumi Hashitani

Koji Asano

Itsuo Sasaki

An oxygen electrode having: an electrode substrate; a first electrode and a first lead wire formed on the electrode substrate; an insulating layer formed on the electrode substrate covering the first lead wire; a second electrode and a second lead wire formed on the electrode substrate, and on the insulating layer; a container substrate bonded to the electrode substrate, and having a first recess with an opening over the first and second electrodes for containing electrolyte; and an oxygen permeable film covering the opening. The oxygen electrode may be provided with lead plates and partially molded in an insulating and fixing resin. An oxygen electrode for measuring an oxygen concentration having a novel structure is provided which can be made more compact and/or be used more easily.

Oxygen electrode and its manufacture

A small glass electrode and process for preparation thereof, the small glass electrode having a bonded structure and comprising a reference electrode composed of silver/silver chloride, a glass substrate having a pad embedded therein, the pad being composed of gold or platinum and circuit-connected to the reference electrode, and a silicon substrate having a (100) plane selectively etched by the anisotropic etching technique and comprising a groove for injecting an electrolyte composed of an aqueous solution containing chlorine such as KCA, or HCA, at least one hole for holding the electrolyte and a glass film formed in a portion corresponding to the reference electrode. The structure of the small glass electrode may be produced by the disclosed process easily and at low cost. Additionally, the small glass electrode, in differing embodiments, may include a reference electrode and a temperature sensor.

Small glass electrode

A small glass electrode and process for preparation thereof are disclosed. This small glass electrode is characterized in that said glass electrode, which has a bonded structure comprises a reference electrode composed of silver/silver chloride, a glass substrate having a pad embedded therein, said pad being composed of gold or platinum and circuit-connected to the reference electrode, and a silicon substrate having a (100) plane selectively etched by the anisotropic etching technique and comprising a groove for injecting an electrolyte composed of an aqueous solution containing chlorine such as KCl, or HCl, at least one hole for holding the electrolyte and a glass film formed in a portion corresponding to the reference electrode. By this structure, the small glass electrode can be easily manufactured at a low cost.

Process for preparation of small glass electrode

An oxygen electrode comprising a plastic sheet, two or three electrode patterns formed on the plastic sheet, a paraffin layer formed on the peripheral portion of the plastic sheet for delineating a sensitive area, a carrier sheet impregnated with an electrolyte and placed on the central portion or the sensitive area of the plastic sheet, and a gas permeable membrane covering the carrier sheet and the paraffin layer. A biosensor may be also provided by further providing a microorganism or enzyme-immobilized layer on the gas permeable membrane of the above oxygen electrode.

Oxygen electrode, biosensor and processes for manufacturing same

The miniaturized oxygen electrode having a small size exceeding the limit of miniaturization of the prior art electrode comprises an insulating substrate 21, 31 and, provided thereon, a pair of electrode patterns 22, 23 each comprising an active section 22A, 23A, a terminal section 22C, 23C for external connection, and a lead wire portion 22B, 23B for the connection thereof, the active sections 22A, 23A being mutually connected through an electrolyte-containing material 24, the electrolyte-containing material 24 being covered with an oxygen-permeable membrane 28, the lead wire portion 22B of at least one 22 of the electrode patterns extending below the active section 23A of at least one of other electrode patterns, 23, with an insulating layer 29 intervening between the lead wire portion 22B and the active section 23A.

Miniaturized oxygen electrode and process of producing same

A small size apparatus for measuring and recording acceleration comprises an acceleration sensor, an A/D converter which converts the output signal of the acceleration sensor to a digital signal, a control element which processes the digital signal, a detachable external memory device which stores data of a change in acceleration and, a battery for supplying electric power to the sensor, the A/D converter, the control element and the external memory device. The small size apparatus is mounted on a moving body to be measured and the entire small size apparatus is driven by the battery. The correct attachment of the external memory device is detected by steps of writing data into a special address, reading the data out thereafter, and comparing the written data and read data. When the read data coincides with the written data, it is judged that the external memory device is correctly attached.

Small size apparatus for measuring and recording acceleration

A miniaturized oxygen electrode comprising: an electrically insulating substrate; an electrolyte-containing material disposed on the substrate to form an electrolyte solution when water is introduced thereto; a set of component electrodes disposed on the substrate and connected with each other via the electrolyte-containing material; a gas-permeable membrane covering the electrolyte-containing material; the set of component electrodes including a cathode on which a reduction reaction of oxygen occurs and an anode as a counterpart of the cathode; the electrolyte-containing material being composed of a first layer and a second layer which are mutually connected, the first layer containing no electrolytes and being connected to the cathode and the second layer containing an electrolyte and being not connected to the cathode, the mutual connection of the first layer and the second layer being effected so that, during the water introduction and a subsequent holding, the electrolyte of the second layer diffuses to the first layer to form a single electrolyte solution layer.

Miniaturized oxygen electrode

An electrolyte composition for screen printing, comprising: an organic solvent; an inorganic salt in the form of a fine powder able to pass through a screen printing mesh, the salt powder being dispersed in the organic solvent; and polyvinyl pyrrolidone dissolved in the organic solvent. A miniaturized oxygen electrode having an oxygen sensing site filled with the electrolyte composition. A process for producing a miniaturized oxygen electrode, including a step of patterning or selectively removing an oxygen gas-permeable membrane at a pad region by removing or peeling off an underlying cover film formed thereunder.

Electrolyte composition for screen printing and miniaturized oxygen

A small oxygen electrode and a method of bonding a fluorine resin film are disclosed. This small oxygen electrode includes a flat electrode substrate having at least two electrodes (a working electrode and a counter electrode) formed thereon, and a container substrate having dents formed to confront the two electrodes and contain an electrolyte therein. The container substrate is bonded to the flat electrode substrate, so that the dent confronting the electrode constituting the working electrode has a through hole extending to the side opposite to the flat electrode substrate and a gas-permeable film is formed to cover the through hole. By using this dent structure, the preparation of an oxygen electrode can be conducted while maintaining a wafer form throughout the process, and formation of an electrode pattern can be facilitated. The method of bonding the fluorine resin film includes treating the fluorine resin film with an agent containing metallic sodium, then treating the fluorine resin film with a silane coupling agent. The treated fluorine resin film is fusion bonded by heating, and if necessary, conducting subsequent treatments in vacuo. By adopting this method, the fluorine resin film can be bonded tightly to the substrate and peeling of the fluorine resin film from the substrate can be prevented.

Oxygen electrode and temperature sensor

A small oxygen electrode and a method of bonding a fluorine resin film are disclosed. This small oxygen electrode includes a flat electrode substrate having at least two electrodes (a working electrode and a counter electrode) formed thereon, and a container substrate having dents formed to confront the two electrodes and contain an electrolyte therein. The container substrate which is bonded to the flat electrode substrate, so that the dent confronting the electrode constituting the working electrode has a through hole extending to the side opposite to the flat electrode substrate and a gas-permeable film is formed to cover the through hole. By using this dent structure, the preparation of an oxygen electrode can be conducted while maintaining a wafer form throughout the process, and formation of an electrode pattern can be facilitated. The method of bonding the fluorine resin film includes treating the fluorine resin film with an agent containing metallic sodium, then treating the fluorine resin film with a silane coupling agent. The treated fluorine resin film is fusion bonded by heating, and if necessary, conducting subsequent treatments in vacuo. By adopting this method, the fluorine resin film can be bonded tightly to the substrate and peeling of the fluorine resin film from the substrate can be prevented.

Oxygen electrode

A miniaturized oxygen electrode which comprises: an electrically insulating substrate; an electrolyte-containing material disposed on the substrate and capable of serving as an electrolytic solution when supplied with water; a set of component electrodes disposed on the substrate and composed of a first component electrode on which a reduction reaction of oxygen dissolved in the electrolytic solution occurs when the miniaturized oxygen electrode is operated and one or more second component electrodes other than the first component electrode, the first component electrode being interconnected with the second component electrodes through the electrolyte-containing material; an oxygen gas-permeable membrane covering the electrolyte-containing material; and the electrolyte-containing material having a length for providing a sufficient distance along the interconnection between the first and second component electrodes such that any electroactive substances, formed on one of the first and second component electrodes during the operation of the miniaturized oxygen electrode, are prevented from reaching the other of the first and second component electrodes when diffusing along the length of the electrolytic solution.

An electrolyte composition for screen printing, comprising: an organic solvent; an inorganic salt in the form of a fine powder able to pass through a screen printing mesh, the salt powder being dispersed in the organic solvent; and polyvinyl pyrrolidone dissolved in the organic solvent A miniaturized oxygen electrode having an oxygen sensing site filled with the electrolyte composition. A process for producing a miniaturized oxygen electrode, including a step of patterning or selectively removing an oxygen gas-permeable membrane at a pad region by removing or peeling off an underlying cover film formed thereunder.

Growing community of inventors

Kawasaki, Japan

Hiroaki Suzuki