Smc Corporation

Hiroaki Saka

Toru Sugiyama

Toru Nakayama

Masaru Saitoh

A non-contact transport device includes a deflector having a flange portion provided with a plurality of nozzle grooves extending radially outward and arranged equidistantly in the circumferential direction. The nozzle grooves are each formed to be hollowed with respect to an upper surface of the flange portion so as to have an arc-shaped cross section, and constitute lead-out channels together with a flat surface of a hollow of a body. A pressure fluid is supplied through a first port of the body into the body and flows through the plurality of nozzle grooves to a workpiece holding surface along first and second curved surfaces of the hollow. As a result, the pressure fluid flowing at high speed between the workpiece holding surface and a workpiece generates a suction force exerted toward the body side, whereby the workpiece is suctioned.

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Bando, Japan

Hiroaki Saka