Yokogawa Electric Corporation

Yokogawa Test & Measurement Corporation

Hiroaki Matsukawa

A measurement apparatusaccording to this disclosure includes a controllerand a spectroscopehaving an optical element in which an apertureto pass light Lto be measured is formed. The controllerexecutes a first process to generate a synthetic spectrum Sr(i) of the narrowed light Lby synthesizing at least a first spectrum S() when a beam spot P of the light Lis at a first position xwithin the apertureand a second spectrum S() when the beam spot P of the light Lis at a second position xwithin the aperture. The first position xincludes a position shifted to one side in a predetermined direction D from a reference position xof the beam spot P within the aperture. The second position xincludes a position shifted to the other side from the reference position x

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Hachioji, Japan

Hiroaki Matsukawa