Average Co-Inventor Count = 11.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Varian Semiconductor Equipment Associates, Inc. (1 from 916 patents)
1 patent:
1. 10515802 - Techniques for forming low stress mask using implantation