Jds Uniphase Corporation

Hiren V Shah

Karl M Kissa

Thomas A Mayer

Marc K Von Gunten

Charles Andrew Hulse

Benjamin F Catching

Jerry Zieba

Glen Drake

Donald M Friedrich

William J Minford

Brad A Duffy

Jason Jiazhan Xu

Jason Reed

Julia Duncan

Richard K Zoborowski

The invention relates to a wafer scale process for the manufacture of optical waveguide devices, and particularly for the manufacture of ridge waveguide devices, and the improved waveguides made thereby. The present invention has found a process for achieving sub-micron control of an optical waveguiding layer thickness by providing a dimensionally stable wafer assembly into which adhesive can be introduced without altering the planar relationship between a carrier wafer and an optically transmissive wafer in wafer scale manufacture. This process permits wafer scale manufacture of optical waveguide devices including thin optically transmissive layers. A pattern of spacer pedestals is created by a deposition and etch back, or by a surface etch process to precisely reference surface information from a master surface to a carrier wafer to a thin optically transmissive wafer. The tolerance achievable in accordance with this process provides consistent yield across the wafer.

Wafer scale method of manufacturing optical waveguide devices and the waveguide devices made thereby

A method of applying a polymer coating uses a nebulized aerosol of solubilized polymer solution having high-viscosity droplets and low-viscosity droplets to form a textured antireflective surface. Air or other gas is used to direct the nebulized aerosol toward the surface of an object. In some embodiments, heated or dried air, such as from an air curtain, is used to promote the formation of high-viscosity droplets. In a particular embodiment, multiple ultrasonic nebulizers are used in combination with synchronized air jets to apply a uniform polymer coating onto a glass panel used in a large-format display system. Dye is optionally added to the solubilized polymer solution to provide a notch filter at 585 nm and/or infrared filter.

Method of applying a uniform polymer coating

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Santa Rosa, CA, United States of America

Hiren V Shah