University of Virginia Patent Foundation

Hilary Bart-Smith

Jianzhong Zhu

Zheng Chen

Carl White

A superficial flow sensor is provided, which may comprise a substrate, and a thin film comprising a self-rolled portion, a stationary portion, and a free ribbon portion. According to some aspects of the present disclosure, the self-rolled portion may be configured to have a residual stress and to deform under external forces.

Flexible, self-rolled superficial flow sensor

A gas flow sensing device, and related method of manufacturing, comprising a conductive layer encapsulated in dielectric film, suspended over a cavity to form a diaphragm. The conductive layer functions as both a heating a sensing element and is patterned to provide uniform heat distribution across the diaphragm. The device is designed to sense flow from any direction relative to the device and the design of the dielectric film and diaphragm reduces sensor drift during prolonged operation.

Growing community of inventors

Charlottesville, VA, United States of America

Hilary Bart-Smith