Hitachi, Ltd.

Hikaru Koyama

Junichi Tanaka

Yasunari Sohda

Noritsugu Takahashi

Masaru Kurihara

Takeshi Ohmori

Toshio Okochi

Toshihiro Kujirai

Atsuko Shintani

An inspection device includes a charged particle optical system that includes a charged particle beam source emitting a charged particle beam and plural lenses focusing the charged particle beam on a sample, a detector that detects secondary charged particles emitted by an interaction of the charged particle beam and the sample, and a calculation unit that executes auto-focusing at a time a field of view of the charged particle optical system moves over plural inspection spots, the calculation unit irradiates the charged particle beam to the sample under an optical condition that is obtained by introducing astigmatism of a predetermined specification to an optical condition that is for observing a pattern by the charged particle optical system, and executes the auto-focusing using an image formed from a signal outputted by the detector in detecting the secondary charged particles.

Inspection device

A data analysis apparatus generates M (M is an integer of 3 or greater) groups each including data regarding a plurality of units from data where first KPIs and K (K is an integer of 2 or greater) explanatory variables are given by 1:1, generates a second KPI indicating the state of the group based on the values of a plurality of first KPIs included in the group, and selects a feature for the first KPIs based on a correlation analysis between the second KPI of each group and the feature of each group calculated based on the explanatory variables.

Data analysis system and apparatus for analyzing manufacturing defects based on key performance indicators

A search apparatus receives an input target value, which indicates a condition to be set in a semiconductor processing apparatus or a result obtained by processing the semiconductor using the processing apparatus, a reference value of the condition inside a search area, and the result, wherein the reference value is indicated by the target value. A prediction model indicating a relation between the condition and the result based on a setting value of the condition inside the search area is generated and, a measured value of the result is obtained. A prediction value is acquired by assigning the target value to the prediction model. The prediction value is set to the reference value when it is determined that the prediction value is closer to the target value, and a prediction value satisfying an achievement condition is set when the prediction value satisfies the achievement condition of the target value.

Search apparatus and search method

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Tokyo, Japan

Hikaru Koyama