Seiko Epson Corporation

Hikaru Iwai

Masayoshi Yamada

Kanechika Kiyose

Chikara Kojima

Koji Ohashi

Eiji Osawa

Osamu Murayama

Yoshio Arai

Shinya Yamazaki

Toshiya Okada

Mitsuru Miyasaka

Keita Kubo

Shigeaki Muramatsu

An ultrasonic device includes an ultrasonic element configured to perform at least one of transmission of an ultrasonic wave along a first axis and reception of the ultrasonic wave input along the first axis, and a protective member provided on the first axis to cover the ultrasonic element. The protective member has a first surface provided with at least one hole through which the ultrasonic wave travelling along the first axis passes, and a second surface intersecting with the first surface and provided with a first opening through which foreign matter entering from the at least one hole is discharged.

Ultrasonic device

An ultrasound probe includes: an ultrasound device configured to perform at least one of transmission and reception of an ultrasound wave; and a case housing the ultrasound device. The ultrasound device includes a vibration plate and a piezoelectric element disposed at the vibration plate. The case is provided with an opening facing the vibration plate, and a first communication hole that is provided at a position different from a position of the opening and that communicates an internal space of the case with outside of the case. The case includes a sealing mechanism configured to prevent entry of a water droplet from the opening into the internal space.

Ultrasound probe

Provided is a piezoelectric device and an MEMS device whose size can be reduced. The piezoelectric device includes: a first substrate that includes a first surface on which a piezoelectric element and a first electrode coupled to the piezoelectric element are disposed; a second substrate that includes a second surface on which a second electrode configured to be coupled to a control circuit is disposed; and a third substrate that is disposed between the first substrate and the second substrate, and includes a third surface bonded to the first surface and a fourth surface facing the second surface, in which the third substrate has a through hole passing through from the third surface to the fourth surface, and a third electrode provided in the through hole and coupled to the first electrode, and the second electrode is coupled to the third electrode and is electrically coupled to the first electrode via the third electrode.

Piezoelectric device and MEMS device

An ultrasonic device includes an ultrasonic sensor, a wiring member, and a housing, in which the wiring member has a covered wire that covers a signal line coupled to the ultrasonic sensor via an insulating layer, and a conductive member that is electrically coupled with the covered wire, the housing has a plurality of housing components having conductivity, and covers the ultrasonic sensor with the plurality of housing components, and the conductive member is electrically coupled to and held by the plurality of housing components.

Ultrasonic device and manufacturing method of ultrasonic device

An ultrasonic apparatus includes a first ultrasonic sensor that transmits an ultrasonic wave to an object and receives the ultrasonic wave reflected by the object, a second ultrasonic sensor that transmits an ultrasonic wave to the object and receives the ultrasonic wave reflected by the object, an determination circuit that outputs an error signal when the difference between a first distance between the first ultrasonic sensor and the object calculated based on ultrasonic wave transmission and reception processing using the first ultrasonic sensor and a second distance between the second ultrasonic sensor and the object calculated based on ultrasonic wave transmission and reception processing using the second ultrasonic sensor is equal to or greater than a threshold value.

Ultrasonic apparatus, detection apparatus, and printing apparatus

A sensor unit includes a sensor device, a holder that holds the sensor device and includes a surface maintained at a reference potential, and a case that houses the holder, in which the case includes a mounting surface in contact with a mounting object, and the mounting surface is provided with a communication portion that causes an inside and an outside of the case to communicate with each other, and the holder includes a protrusion that protrudes from the communication portion and comes in contact with the mounting object.

Sensor unit and electronic device

An ultrasonic device includes an ultrasonic element that performs at least one of transmitting an ultrasonic wave along a first axis and receiving the ultrasonic wave input along the first axis, and a protective member that is provided on the first axis and covers the ultrasonic element, in which the protective member has a plurality of pores through which the ultrasonic wave traveling along the first axis passes.

An ultrasonic device includes a vibration portion, a first electrode, a piezoelectric body, and a second electrode which are laminated in this order in a laminate direction, in which an outer circumferential edge of the first electrode is larger than an outer circumferential edge of the piezoelectric body in a plan view across the laminate direction, in which the piezoelectric body includes an active portion that is provided in the vibration portion, and an extraction portion that is connected to the active portion and is provided over the inside and the outside of the vibration portion, in which a width dimension of the extraction portion is smaller than a width dimension of the active portion, and in which the second electrode is provided on the active portion and the extraction portion.

Ultrasonic device and ultrasonic apparatus

An ultrasonic device includes an element substrate provided with an ultrasonic transducer array having a plurality of ultrasonic transducers arranged in an array, and having a first surface and a second surface located on an opposite side to the first surface, a terminal part disposed on the first surface of the element substrate, and outside the ultrasonic transducer array in a planar view viewed from a normal direction of the first surface, and electrically connected to the ultrasonic transducers, and a reinforcing plate disposed on the second surface of the element substrate in an area overlapping the terminal part in the planar view, and higher in bending rigidity than the element substrate.

Ultrasonic device, ultrasonic module, electronic apparatus, and ultrasonic measurement apparatus

An ultrasonic sensor includes: a substrate disposed across an XY plane; a plurality of spaces formed in the substrate in at least one direction of an X-axis direction and a Y-axis direction; a vibrating plate that is provided on the substrate such that the spaces are enclosed and that has a first surface on the substrate side and a second surface facing the first surface; a piezoelectric element that is provided at a portion on the second surface side of the vibrating plate that corresponds to the space and that transmits and/or receives an ultrasonic wave; a surrounding plate that is provided on the second surface side of the vibrating plate and surrounds a peripheral region of the piezoelectric element; and a support member provided at a position, at which the support member is not overlapped with the piezoelectric element, between a surface of the surrounding plate on the piezoelectric element side and the second surface of the vibrating plate.

Growing community of inventors

Matsukawa, Japan

Hikaru Iwai