Other

Tokyo Electron Limited

Covalent Materials Corporation

Hideyuki Yokoyama

Takanori Saito

Ken Nakao

Norihiko Saito

Tomio Konn

Tomohiro Nagata

Sunao Seko

Masakazu Kobayashi

Eiichi Toya

Toshiyuki Makiya

Hisaei Osanai

Hiroyuki Honma

Kazuhiko Shimanuki

It is provided that a reflection plate of semiconductor heat treatment, which is resistant to cracks or deformations by controlling the adsorption of foreign materials and the production of reaction. Said reflection platefor semiconductor heat treatment is composed of a disk-shaped or ring-shaped plate of optically transmissible material and a plateof inorganic material hermetically enclosed in said disk-shaped or ring-shaped plate, in which said plate of inorganic material has at least one side in contact with said plate of optically transmissible material, said at least one sidehaving a surface roughness of Ra 0.1 to 10.0 &#x3bc;m, said at least one sideformed groovestherein.

Reflection plate for semiconductor heat treatment and manufacturing method thereof

A heater sealed with carbon wire heating element has a carbon wire heating element sealed with a quartz glass member, the carbon wire being prepared by knitting carbon single fibers into a knitted cord of a braid, each wire having a crystal structure with a interlayer spacing d (002) thereof being 0.343 or less and crystallite size Lc (002) thereof being 4.0 nm or more.

Heater sealed with carbon wire heating element

A sealing terminal includes internal connection lines which are connected to heating elements and external connection lines via which power is supplied. A quartz glass body includes a plurality of grooves in its outer surface to retain the internal and external connection lines in place. Conductive foils are used to connect the internal and external lines which are housed in a quartz glass tube so that the ends of the lines project out of the respective ends thereof. A plug is disposed in the lower end of the tube to close the same. Spark generation is prevented while a low electrical resistance sealed terminal which is simple in structure and quick and easy to assemble, results.

Sealing terminal

Growing community of inventors

Yamagata, Japan

Hideyuki Yokoyama