Kabushiki Kaisha Toshiba

Hideyuki Shinonaga

Kiyohisa Terai

Takaaki Murata

Hirokatsu Suzuki

Tohru Tamagawa

A gas laser device includes a high frequency power source for generating a high frequency output voltage and a pair of electrodes positioned sandwiching a discharge gap through which laser gas circulates. The pair of the electrodes are connected to the high frequency power source for applying the high frequency output voltage across the electrodes to achieve discharge in the discharge gap and to thereby generate laser light. Each of the electrodes includes an electrode element, a capacity coupling control element provided on either side of the electrode element, and a dielectric shell. The dielectric shell surrounds the electrode element and the capacity coupling control element, therefore the discharge occurs between the dielectric shells of a pair of the electrodes. The dielectric constant of the capacity coupling control means is lower than that of the dielectric shell.

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Mie, Japan

Hideyuki Shinonaga