Ulvac, Inc.

Hideyuki Odagi

Tetsuya Shimada

Masahiro Matsumoto

Masashi Kubo

Takafumi Matsumoto

Kouichi Hanzawa

Susumu Ikeda

Minoru Dogi

Shun Mikami

Mineharu Moriya

A thin film forming apparatus such that a substrate can be easily fixed/removed to/from the outer circumferential surface of a drum type substrate holder through a simple arrangement. The drum type substrate holder () is supported in a horizontal posture rotatably about a horizontal rotational shaft in a film deposition chamber A jig () holding a substrate () fixedly is transferred by an arm horizontally onto the outer circumferential surface of the drum type substrate holder (), and an end part () of the substrate fixing jig () can be secured by a securing device () provided at the corner part () of the outer circumferential surface of the drum type substrate holder ().

Thin film forming apparatus

There is provided a film forming apparatus which is capable of forming a film on both surfaces of a substrate by sputtering continuously with high efficiency by restraining a rise in temperature of the substrate to a predetermined value or higher. In a film forming chamberthe pressure of which is controlled, while a rotating drumis rotated by the driving of a drive motor, a film is formed on the top surface of a substrateon a substrate trayheld on a substrate holderby cathodesandfor outer surface to which a d.c. voltage or an a.c. voltage or a high-frequency voltage is applied, and also a film is formed on the back surface of the substrateon the substrate trayheld on the substrate holderby cathodesandfor inner surface to which a d.c. voltage or an a.c. voltage or a high-frequency voltage is applied, by which a high-quality film is formed on both surfaces of the substrateby sputtering continuously with high efficiency by restraining a rise in temperature of the substrate to a predetermined value or higher.

Film forming apparatus

Growing community of inventors

Kanagawa, Japan

Hideyuki Odagi