Omron Corporation

Hideyuki Murai

Akira Matsui

Naoki Nishimori

Kosuke Sugiyama

Kenji Homma

Jun Ota

Jun Takashima

Sayuki Nakada

Rie Masuda

Koichi Ekawa

Kenjii Homma

An illumination device has a board, a plurality of light emitting elements that are mounted on the board, the plurality of light emitting elements being disposed such that a light irradiation direction of each light emitting element becomes substantially perpendicular to the board, and a plurality of lenses. Each of the plurality of lens is paired with one of the plurality of light emitting elements. A relative positional relationship between the light emitting element and the lens in each pair varies according to a position on the board in which the corresponding light emitting element is disposed.

Illumination device and producing method thereof

Providing a spectrometric measuring instrument suitable for in-line measurement for example in a semiconductor manufacturing process, an FPD manufacturing process, or the like, by realizing size reduction and imparting resistance to distance fluttering, angle fluttering in a horizontal direction, and angle fluttering in a perpendicular direction. A light interference type spectral element for gradually changing a wavelength of transmitted light by means of a transmitted position is provided immediately before the photoelectric transfer part array device, and based upon a light-receiving side optical system having the function of detecting a change in state of polarization of a reflected light from a sample, and a series of light-receiving amount data obtained from each of photoelectric transfer parts of the photoelectric transfer part array device, polarized light is analyzed. By fitting of a measured waveform to a theoretical waveform, a film thickness or film quality is obtained.

Spectrometric measuring instrument

Growing community of inventors

Kobe, Japan

Hideyuki Murai