Matsushita Electric Industrial Co., Ltd.

Panasonic Corporation

Hidetoshi Utsuro

Kazumasa Takata

Takashi Urashima

Tomotaka Furuta

By diffracting light emitted from a collimator lens into lights of different orders by a transmission diffraction grating, applying the diffracted lights to a flat surface of an object, forming the light that has been reflected on the flat surface of the object and thereafter retransmitted through the transmission diffraction grating into an image in a position located apart from the optical axis of the outgoing light and measuring the angle of the object with respect to the optical axis of the collimator lens using the image location and the order of the light formed as the image, the angle in a wide range can be measured with a high resolving power.

Angle measuring device and method

An inspection method for evaluating the performance of an optical component at high precision is provided. According to the inspection method, a first light beamand a second light beamboth having different phases are generated from light which has passed through an optical component, and are interfered with each other to form an interference region. A linear line, a linear lineand linear linesare set within the interference regionso as to determine a distribution of light intensities on each of the linear lines. Then, a frequency corresponding to the maximal light intensity is determined. Further, an approximated liner line or an approximated curved line is determined from a plurality of frequencies determined for each of the linear line. Then, the aberration of the optical component is evaluated based on the coefficient of the approximated linear or curved line.

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Osaka, Japan

Hidetoshi Utsuro