Seiko Epson Corporation

Hidetoshi Tako

Kazuya Kitada

Hidemichi Furihata

Masayuki Omoto

Kazuhide Gomi

A piezoelectric element includes: a first electrode provided on a base; a piezoelectric layer provided on the first electrode and containing a complex oxide which has a perovskite structure and contains potassium, sodium, and niobium; and a second electrode provided on the piezoelectric layer, in which the first electrode contains platinum, the first electrode is (111) preferentially oriented, and a platinum atom contained in the first electrode is bonded to an oxygen atom at an interface between the first electrode and the piezoelectric layer.

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Chino, Japan

Hidetoshi Tako