Hitachi-kokusai Electric Inc.

Kokusai Electric Corporation

Hideto Shimizu

Kazuhide Asai

Kayoko Yashiki

Kazuyoshi Yamamoto

Toshiro Koshimaki

Nobuhisa Makino

A management apparatus includes: a manipulation & display unit including a user interface for selecting a reference device information, and configured to display: a difference between the device information obtained from the substrate processing device and the reference device information selected via the user interface; a content of the reference device information; and a content of the device information, and further configured to receive a command for modifying the device information; and a control unit configured to modify the device information based on the command received from the manipulation & display unit and configured to transmit a modified device information to the substrate processing device.

Management apparatus, substrate processing system and non-transitory computer-readable recording medium

A management device includes a measurement data storage unit configured to store measurement data transmitted from a substrate processing apparatus; a setting unit configured to set an item of the measurement data as a determination target, reference data, and upper and lower limit values with respect to the reference data; a counting unit configured to count the number of times that the value of the measurement data corresponding to the item exceeds the upper and lower limit values; and a determining unit configured to determine that the measurement data as a determination target is abnormal, when the counted number exceeds a predetermined value.

Apparatus, method, and computer-readable medium for managing abnormality data measured in the substrate manufacturing process

Growing community of inventors

Toyama, Japan

Hideto Shimizu