Seiko Epson Corporation

Epson Toyocom Corporation

Seiko Npc Corporation

Hideto Naruse

Yutaka Takada

Kenji Sato

Takayuki Kikuchi

Masayuki Takahashi

An angular velocity detection apparatus includes a vibrator that generates a signal that includes an angular velocity component and a vibration leakage component, a driver section that generates the drive signal, and supplies the drive signal to the vibrator, an angular velocity signal generation section that extracts the angular velocity component from the signal generated by the vibrator, and generates an angular velocity signal corresponding to the magnitude of the angular velocity component, a vibration leakage signal generation section that extracts the vibration leakage component from the signal generated by the vibrator, and generates a vibration leakage signal corresponding to the magnitude of the vibration leakage component, and an adder-subtractor section that adds the vibration leakage signal to the angular velocity signal, or subtracts the vibration leakage signal from the angular velocity signal, in a given ratio to correct temperature characteristics of the angular velocity signal.

Angular velocity detection apparatus and electronic instrument

An angular velocity detection apparatus (i.e., physical quantity detection apparatus) includes a gyro sensor element (i.e., physical quantity detection element) that allows an angular velocity detection signal that corresponds to the magnitude of an angular velocity (i.e., physical quantity) and a leakage signal of vibrations based on a drive signal (square-wave voltage signal) to flow through a detection electrode, a driver circuit that generates the drive signal, a synchronous detection circuit that performs a synchronous detection process on a detection target signal that includes the angular velocity detection signal and the leakage signal based on a detection signal that is synchronized with the drive signal, and a phase change circuit that changes a relative timing of at least one of a rising edge and a falling edge of the detection signal with respect to the detection target signal based on a control signal so that at least part of the leakage signal is output by the synchronous detection process.

Physical quantity detection apparatus, method of controlling physical quantity detection apparatus, abnormality diagnosis system, and abnormality diagnosis method

A physical quantity sensor includes a vibration element having drive arm sections and a detection arm section, a driving circuit generating a driving signal for driving the drive arm sections with a first driving line and a second driving line, and a detection circuit detecting a detected signal from the detection arm section with a first detection line and a second detection line. At least one of the first driving line and the second driving line is wired so that a static coupling is generated with respect to the first detection line and the second detection line.

Physical quantity sensor

A piezoelectric device includes: a package including a first recessed part provided on a first surface of the package, a second recessed part provided on a second surface of the package, and a penetrating part passing partially from the first recessed part through the second recessed part; a piezoelectric element housed in the first recessed part; a lid disposed on the upper side of the first recessed part; an IC chip disposed and fixed in the second recessed part of the package so as to block a part of the penetrating part; and a sealing part provided to the second recessed part. The IC chip and the sealing part close up the penetrating part and the lid seals the first recessed part air-tightly. A piezoelectric device is provided. The piezoelectric device realizes thickness reduction thereof without undergoing warpage and breakage of an IC chip or a package thereof.

Piezoelectric device

A piezoelectric oscillator includes: a package including a first recessed portion formed on a first surface, a second recessed portion formed on a second surface with at least a part of a side surface being open, and a conductor wired from at least one of an inside surface of the first recessed portion and an inside surface of the second recessed portion to an outside surface; a piezoelectric element accommodated in the first recessed portion; a lid being in contact with the first surface and air-tightly sealing the first recessed portion; a circuit element accommodated in the second recessed portion and connected with the conductor; a resin portion formed in the second recessed portion to cover the circuit element; and an electrical check terminal connected with the conductor of the package.

Growing community of inventors

Okaya, Japan

Hideto Naruse