Seiko Epson Corporation

Hideto Izumi

Hideki Hahiro

Masao Nakayama

A liquid ejecting head includes a piezoelectric element having a first electrode on a vibration plate, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric material layer. The piezoelectric layer has functional portions sandwiched between the first and second electrodes; the second electrode configures a common electrode provided continuously across a plurality of the functional portions; the piezoelectric layer extends to an outer side of an end of the first electrode; the vibration plate has a first region opposing the first electrode, a second region opposing an area of the piezoelectric layer extending further toward an outer side than the first electrode, and a third region further toward the outer side than the piezoelectric layer; the second region has a thickness substantially equal to or greater than the thickness of the first region; and the third region is thinner than the first region.

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

A piezoelectric element includes: a base substrate; a lower electrode formed above the base substrate; a ferroelectric layer formed above the lower electrode; and an upper electrode formed above the ferroelectric layer, wherein an angle of a corner defined by a side surface of the ferroelectric layer and a top surface of the base substrate is between 45&#xb0; and 75&#xb0;.

Growing community of inventors

Chino, Japan

Hideto Izumi