Horiba Stec, Co., Ltd.

Hidetaka Yada

Takehisa Hataita

Akihiro Taguchi

Masashi Hamada

Sotaro Kishida

Masaki Inoue

Soutaro Kishida

Akira Matsuura

Yuichiro Asaumi

Soichiro Hirai

A vaporization device is provided with a control valve on a flow path along which flows a liquid material, a vaporizing portion in which the liquid material is vaporized by decompression or heating, a liquid flow rate sensor that measures a flow rate of a liquid material flowing along the flow path, and a valve controller that controls the control valve using PI control or PID control that is based on a set value showing a set flow rate and on a measurement value of the flow rate that is measured by the liquid flow rate sensor. The vaporization device is configured to, during a transient response period of the flow rate that is measured by the liquid flow rate sensor, switch the integral gain set in the valve controller from a reference integral gain to a corrected integral gain that is different from the reference integral gain.

Vaporization device with integral gain switiching portion for valve controller

The present invention is a liquid material vaporizing device that heats a liquid material supplying pipe without providing a heating mechanism, the liquid material vaporizing device including: a gas-liquid mixer unit configured to mix a liquid material and a gas to generate a gas-liquid mixture; a liquid material supplying pipe configured to supply the liquid material to the gas-liquid mixer unit; a vaporizer unit configured to heat the gas-liquid mixture to vaporize the liquid material; and a casing configured to house the gas-liquid mixer unit, the vaporizer unit, and the liquid material supplying pipe, in which a channel configured to guide convection of heat from the vaporizer unit to the liquid material supplying pipe is provided inside the casing.

Liquid material vaporizing device

The present invention is a fluid heater that can easily be reduced in size, that can be manufactured inexpensively, and that provides a stable heating performance. This fluid heater heats a fluid using a heater, and is provided with a heating block in which an internal flow path having an intake port through which the fluid is introduced, and a discharge port through which the fluid is discharged is formed, and in which a heater insertion portion that extends in a predetermined axial direction is formed, wherein the internal flow path has a plurality of main flow path portions that extend in the predetermined axial direction, and one or a plurality of connecting path flow portions that connect the plurality of main flow path portions together.

Fluid heater

The present invention makes it possible to reduce the size of a vaporization system by eliminating the need for conduits in the vaporization system, without it being necessary to form a flow path in order for a supply rate controller to be mounted inside a vaporizer, and is formed by a vaporizer that vaporizes a liquid material; a supply rate controller that controls a supply rate of the liquid material to the vaporizer; and a manifold block inside which an internal flow path is formed, and that has a device mounting surface on which both the vaporizer and the supply rate controller are mounted, wherein, as a result of the vaporizer and the supply rate controller being mounted on the device mounting surface, they are connected together via the flow path.

Vaporization system

A structure comprising: a base; a diaphragm; a peripheral wall member of which one end surface is attached to a circumferential edge part of the diaphragm and the other end surface is attached on the top surface of the base to form an internal space together with the base and the diaphragm; a protruding part that protrudes from the top surface of the base; and a communicatively connecting path that extends from a bottom surface side of the base toward the diaphragm, and communicatively connects the internal space and the outside to each other to flow fluid, wherein on an outer lateral surface of the protruding part, an opening is formed in a part intersecting with an inner lateral surface of the communicatively connecting path, and a part of a fore end inner surface of the communicatively connecting path is formed in the protruding part.

Structure for use with fluid diaphragm

In order to provide a fluid resistance device that is easily manufactured, compact, accurate, and uniform in performance, the fluid resistance device comprises two members that have facing surfaces that face each other and a downstream end of the upstream side flow channel and an upstream end of the downstream side flow channel open at positions displaced from each other on the facing surfaces, and a ring body that is arranged to surround the downstream end opening and the upstream end opening and that forms the fluid resistance channel between the downstream end opening and the upstream end opening by being sandwiched by the facing surfaces, and is so configured that the ring body is made of a material harder than that of each member, and the ring body breaks into the facing surfaces by fastening two members so as to make the facing surfaces approach each other.

Fluid resistance device

Provided is a flowmeter with a flow tube through which fluid flows; a cooling apparatus adapted to cool a part of the flow tube; a first temperature detecting section for detecting the temperature of the flow tube cooled by the cooling apparatus; a second temperature detecting section for detecting the temperature of the cooling apparatus; a third temperature detecting section for detecting the temperature of a non-cooling area upstream of a cooling area in the flow tube; and an information processing section, which controls the cooling apparatus make a difference between the temperature detected by the second temperature detecting section and the temperature detected by the third temperature detecting section to be a prescribed value, and calculates the flow rate of the fluid flowing in the flow tube.

Growing community of inventors

Kyoto, Japan

Hidetaka Yada