Jeol Ltd.

The University of Tokyo

Hidetaka Sawada

Fumio Hosokawa

Naoya Shibata

Takeo Sasaki

Yu Jimbo

Yuji Kohno

Shigeyuki Morishita

Yuji Konyuba

Masashi Shimizu

Kazuya Omoto

Yukihito Kondoh

Takumi Sannomiya

Wataru Inami

An aberration correcting device includes a first multipole which generates a hexapole field; a second multipole which generates a hexapole field with a polarity opposite to a polarity of the hexapole filed generated by the first multipole; a third multipole which is disposed between the first multipole and the second multipole and generates an octupole field; a first transfer lens system disposed between the first multipole and the third multipole; and a second transfer lens system disposed between the third multipole and the second multipole. The first transfer lens system includes a plurality of fourth multipoles which generate a field in which an electromagnetic-field superposed quadrupole field and an octupole field are superposed; and the second transfer lens system includes a plurality of fifth multipoles which generate a field in which an electromagnetic-field superposed quadrupole field and an octupole field are superposed.

Aberration correcting device and electron microscope

An aberration corrector for an electron microscope includes a geometric aberration corrector provided with a transfer lens system, wherein the transfer lens system includes an optical system for chromatic aberration correction, the optical system for chromatic aberration correction has a first portion, a second portion, and a third portion disposed along an optical axis, and each of the first portion, the second portion, and the third portion has a thickness in a direction along the optical axis and generates an electromagnetic field having two-fold symmetry in which an electric field having two-fold symmetry and a magnetic field having two-fold symmetry are superimposed.

Aberration corrector and electron microscope

A distortion measurement method for an electron microscope image includes: loading a distortion measurement specimen having structures arranged in a lattice to a specimen plane of an electron microscope or a plane conjugate to the specimen plane in order to obtain an electron microscope image of the distortion measurement specimen; and measuring a distortion from the obtained electron microscope image of the distortion measurement specimen.

Distortion measurement method for electron microscope image, electron microscope, distortion measurement specimen, and method of manufacturing distortion measurement specimen

There is provided a liner tube capable of reducing the effects of magnetic field variations on an electron beam. The liner tube () is disposed inside the electron optical column () of an electron microscope (). The interior of the tube () forms a path for the electron beam (EB). The liner tube () has a first cylindrical member () that is made of copper, gold, silver, or an alloy consisting principally of one of these metals.

Liner tube and electron microscope

An electron microscope is provided which can measure, with high sensitivity and high positional resolution, an amount of deflection of an electron beam occurring when it is transmitted through a sample. The electron microscope () is adapted to measure the amount of deflection of the electron beam (EB) when it is transmitted through the sample (S), and has an electron beam source () producing the electron beam (EB), an illumination lens system for focusing the electron beam (EB) onto the sample (S), an aperture () having an electron beam blocking portion () for providing a shield between a central portion (EB) and an outer peripheral portion (EB) of the cross section of the beam (EB) impinging on the sample (S), and a segmented detector () having a detection surface () for detecting the electron beam (EB) transmitted through the sample (S). The detection surface () is divided into a plurality of detector segments (D-D).

Electron microscope and measurement method

An aberration corrector has two stages of dodecapole (12-pole) elements each of which has first through twelfth poles arranged in this order. Exciting coils of the (4n+1)th poles and the exciting coils of the (4n+4)th poles are connected with a first reversible power supply in series (where n=0, 1, 2) to produce magnetic fields which are identical in absolute value but mutually opposite in sense relative to the optical axis within a plane perpendicular to the axis. The exciting coils of the (4n+3)th poles and the exciting coils of the (4n+2)th poles are connected with a second reversible power supply in series to produce magnetic fields which are identical in absolute value but mutually opposite in sense relative to the optical axis within the plane perpendicular to the axis.

Two-stage dodecapole aberration corrector for charged-particle beam

A multipole lens () which can produce static magnetic fields showing different strengths in the direction of travel of an electron beam has lens subasssemblies () stacked on top of each other. The lens subassemblies () have yokes (), respectively, and polar elements (), respectively. The polar elements () have base portions (), respectively, magnetically coupled to the yokes (), respectively, and front end portions (), respectively, magnetically coupled to the base portions (), respectively. Magnetic field separators () made of a nonmagnetic material are mounted between the front end portions () which are successively adjacent to each other in the direction of stacking of the lens subassemblies ().

Multipole lens, aberration corrector, and electron microscope

A spherical aberration corrector is offered which permits a correction of deviation of the circularity of at least one of an image and a diffraction pattern and a correction of on-axis aberrations to be carried out independently. The spherical aberration corrector () is for use with a charged particle beam instrument () for obtaining the image and the diffraction pattern and has a hexapole field generating portion () for producing plural stages of hexapole fields, an octopole field superimposing portion () for superimposing an octopole on at least one of the plural stages of hexapole fields to correct deviation of the circularity of at least one of the image and diffraction pattern, and a deflection portion () for deflecting a charged particle beam.

Spherical aberration corrector, method of spherical aberration correction, and charged particle beam instrument

A method for axial alignment of a charged particle beam relative to at least three stages of multipole elements and a charged particle beam system capable of making the axial alignment. Some parts of the orbit of the beam or the distributions of three astigmatic fields, or both, are simultaneously translated in a direction perpendicular to the optical axis such that astigmatisms of the same order and same type due to axial deviations between successive ones of the astigmatic fields cancel.

Method for axial alignment of charged particle beam and charged particle beam system

The chromatic aberration corrector () has a first multipole element () for producing a first electromagnetic field and a second multipole element () for producing a second electromagnetic field. The first multipole element () first, second, and third portions () arranged along an optical axis (OA) having a thickness and producing a quadrupole field in which an electric quadrupole field and a magnetic quadrupole field are superimposed. In the first and third portions (), the electric quadrupole field is set stronger than the magnetic quadrupole field. In the second portion (), the magnetic quadrupole field is set stronger than the electric quadrupole field. The second portion () produces a two-fold astigmatism component that is opposite in sign to two-fold astigmatism components produced by the first portion () and third portion ().

Chromatic aberration corrector and electron microscope

An electron microscope is offered which can correct chromatic and spherical aberrations without producing residual aberrations. In this microscope, a chromatic aberration-correcting optical system and a spherical aberration-correcting optical system are connected in series (in tandem) via a connection system. That is, the chromatic aberration-correcting optical system and the spherical aberration-correcting optical system are configured independently. Chromatic and spherical aberrations are corrected separately.

Electron microscope

A scanning transmission electron microscope using optical fibers as optical guiding media. The microscope obtains a high-angle scattering image or a dark-field image from electrons transmitted through a specimen. A scintillator converts electrons transmitted through the specimen into optical signals. The optical fibers couple outputs from the scintillator to the photodetector segments. The connections of the fibers with the photodetector segments are formed into arbitrary shapes.

Transmission electron microscope

A spherical aberration corrector and method is offered, which is easy to design and which can correct spherical aberration and even six-fold astigmatism in a charged particle beam instrument. The corrector has a first pair of multipole elements for producing a first pair of three-fold symmetric fields in which three-fold astigmatisms produced mutually are canceled out and a second pair of multipole elements for producing a second pair of three-fold symmetric fields in which three-fold astigmatisms produced mutually are canceled out. The second pair of multipole elements produce six-fold astigmatisms angularly spaced by 30&#xb0; about an optical axis from six-fold astigmatisms produced by the first pair of multipole elements.

Spherical aberration corrector and method of spherical aberration correction

An aberration corrector has two stages of multipole elements each of which has a thickness along the optical axis. Each multipole element produces a static electric or magnetic field of 3-fold symmetry and a static electromagnetic field of 2- or 3-fold symmetry superimposed on the static electric or magnetic field. In each of the multipole elements, the static electromagnetic field is so set that magnetic and electric deflecting forces on an electron beam accelerated by a given accelerating voltage substantially cancel out each other. Thus, chromatic aberration is corrected. Also, spherical aberration is corrected by the static electric or magnetic fields of 3-fold symmetry produced by the multipole elements.

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Tokyo, Japan

Hidetaka Sawada