Kabushiki Kaisha Toshiba

Kioxia Corporation

Hidetaka Eguchi

Takeichiro Nishikawa

Daiki Kiribuchi

Masaki Honda

Kenji Iwasa

A manufacturing control apparatus has an acquiring part that acquires past manufacturing data in which a target value of an output value of the intermediate product, the output value of the intermediate product, and quality of a final product produced from the manufacturing apparatus are associated with one another, an output predicting part that predicts, based on the target value of the intermediate product and the output value of the intermediate product in the past manufacturing data, the output value of the intermediate product for each of possible target values of the intermediate product, and a quality predicting part that predicts, based on the output value of the intermediate product and the quality of the final product in the past manufacturing data, the quality of the final product from a predicted value of the output value of the intermediate product for each of the predicted possible target values.

Test circuit and test method

According to one embodiment, a manufacturing method of a magnetic recording medium includes measuring characteristics of multilayer film including a magnetic recording layer, calculating a residual between an index value to set a sputtering power and the characteristics, acquiring a feedback correction factor by calculating moving average deviations of the residual, and calculating a new index value of each layer in the multilayer film by using a calculation model which estimates the characteristics from calculated film thicknesses using a virtual metrology technique, referring to the feedback correction factor and performing backward calculation with a solver using an electronic calculator.

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Ota, Japan

Hidetaka Eguchi