Matsushita Electric Industrial Co., Ltd.

Hideshi Ueda

Noriaki Yukawa

Akira Kobayashi

Kazumasa Okumura

Masamichi Morimoto

Eiichi Hachiya

Kazuhiro Ikurumi

Ken Shimono

Tsuyoshi Nomura

Yoshikazu Okahashi

Yutaka Mitsumoto

Nobutaka Taira

Shoichi Ishii

Daisuke Ookawara

An image pickup camera is arranged, so that a plurality of components are adapted to be sequentially imaged by corresponding image pickup device with a timing whereby light for imaging is prevented from affecting the other image pickup operation while the components are let to pass above the image pickup camera. The hold posture of each of the plurality of components can be imaged separately without decreasing the cycle time.

Device and method for picking up image of component, and component mounting apparatus

A high-resolution image pickup method includes dividing each of a plurality of light-receiving pixels of an image pickup sensor for capturing image information on an inspection subject into a plurality of regions, and capturing the image information from the inspection subject for each of the divided regions, thereby finally capturing image information on the inspection subject with all the regions of the light-receiving pixels.

High-resolution image pickup method and apparatus therefor

A display screen inspection method according to the present invention takes a display screen of a display device as an inspection subject and makes decisions on defects of the display screen. The method includes performing a separation between display operating portions and display non-operating portions of the inspection subject present in a gray image from image data of individual pixels of the gray image obtained by picking up an image of the inspection subject, selectively extracting image data of only proper display operating portions and compressing the image data to be inspected for defects, and inspecting the selectively extracted image data for any defects.

Display screen inspection method

A foreign matter detection device, for detecting a foreign matter on a photomask of transparent material with opaque patterns formed thereon, includes a laser source for emitting an S-polarized laser beam so as to impinge on a first surface of the photomask which reflects a P-polarized laser beam. A light source is provided to illuminate the photomask at an opposed surface to the first surface, from which a light transmits. This reflected P-polarized laser beam and transmitted light enters, through a condenser lens and a deflection plate, into a CCD in which an image representing the condition of the impinged surface is obtained. Since the P-polarized laser beam indicative of the corner edge of the pattern is offset by the transmitted light passing around the same corner edge, the pattern image is obscured and foreign matter is distinguishable in the obtained image.

Foreign matter detection device

A pattern recognition apparatus detects a coincidence between an input image pattern and a target pattern. Input image data f.sub.ij are received, where f.sub.ij denotes a concentration of the input image pattern at a picture element i,j on a two-dimensional plane of the input image pattern. Mask data g.sub.uv is stored, where g.sub.uv denotes a concentration of the target pattern at a point u,v on a two-dimensional plane of the target pattern. The mask data g.sub.uv is scanned with respect to the input image data f.sub.ij and a proportional coefficient is computed corresponding to each picture element i,j of the two two-dimensional plane of the input image pattern. The proportional coefficient denotes a ratio between the concentration of the input image data f.sub.ij and the concentration of the mask data g.sub.uv. The input image data f.sub.ij is divided into a plurality of partial templates denoting a two-dimensional subsection of the input image pattern. For each partial template, a proportional evaluation index .sigma..sub.ij is calculated corresponding to each picture element i,j of the two-dimensional plane of the input image pattern. The proportional evaluation index .sigma..sub.ij denotes a degree of dispersion of the proportional coefficients within each partial template. Be examining the dispersion of the proportional coefficients, a pattern coincidence can be detected.

Pattern position recognizing apparatus

A shape recognition apparatus for detecting a boundary of an object using a video camera converts an image signal to a binary signal, and detects boundary points showing the boundary from the binary signal, Then, boundary angle and average of boundary angle difference are calculated based on the boundary points, and thereby corners of the boundary are recognized.

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Yao, Japan

Hideshi Ueda