Canon Kabushiki Kaisha

Hideo Tanaka

Yoshikazu Miyajima

Yasuhito Sasaki

Hitoshi Sato

Kazunori Iwamoto

Yukio Takabayashi

Naosuke Nishimura

Katsumi Asada

Toshihiko Nishida

Katsumasa Yamazaki

A conveyance hand which conveys an object, includes a base, and a plurality of supports arranged on the base and configured to support the object. The plurality of supports include a first attraction pad configured to attract the object, and a second attraction pad configured to attract the object by a force weaker than the first attraction pad.

Conveyance hand with attraction pad

A holding device for holding a substrate includes a base including an intake hole and an exhaust flow path communicating with the intake hole, a moving member which is movable in a gravity direction by coming into contact with a substrate, and a determination unit configured to determine whether a moving member holds a substrate on the basis of changes in pressure of the exhaust flow path exhausted by an exhaust unit.

Holding device, transport device, lithographic apparatus, and article manufacturing method

Disclosed is technology for holding a substrate and, specifically, an object holding apparatus including a chuck for holding an object, a holding unit for holding the chuck, a generating unit provided in the holding unit, for generating a field related to an attraction force, a member provided in the chuck and attracted by the generating unit in accordance with the field, and a supporting unit for supporting one of the generating unit and the member, for movement at least in a direction nearing the other and in a direction away from the other.

Substrate holding technique

A planar pulse motor includes a movable element and a stator, wherein the movable element contains a magnetic material, and has a plurality of convex portions on a surface thereof facing the stator. The stator includes a plurality of magnetic field generators to drive the movable element, and each magnetic field generator includes a yoke having a plurality of teeth and a coil which excites the yoke. The planar pulse motor includes a controller which controls rotation of the movable element by energizing magnetic field generators selected from magnetic field generators, whose regions do not include a center line of the movable element along a driving direction of the movable element and do not include portions outside a region facing the movable element, of the plurality of magnetic field generators.

Planar pulse motor, exposure apparatus, and device manufacturing method

An exposure apparatus includes a stage configured to hold an original thereon and to move in a horizontal direction, a first interferometer configured to emit first measurement light used for measuring a position of the stage in a vertical direction thereof, a first mirror provided on a bottom surface of the stage, and a second mirror provided directly below the first mirror. The second mirror is disposed so as to guide the first measurement light emitted from the first interferometer to the first mirror.

Exposure apparatus configured to minimize effects of mechanism for measuring stage position on peripheral mechanism and device-manufacturing method

A moving mechanism includes a first structural member having a first guide surface, a moving member being movable along the first guide surface, a second structural member having a second guide surface, and an actuator having a movable element provided on the moving member and a stator which is movable along the second guide surface. The first structural member is supported by the second structural member at three positions.

Moving mechanism and stage system in exposure apparatus

A positioning apparatus including a coarse motion stage, a first moving mechanism to move the coarse motion stage with a large stroke, a fine motion stage, and a second moving mechanism to move the fine motion stage with a small stroke relative to the coarse motion stage. In addition, at least two couplings transmit forces from the coarse motion stage to the fine motion stage, and the couplings apply the forces in the same direction from at least two sides of the fine motion stage.

Positioning apparatus and exposure apparatus using the same

A stage apparatus includes a base, a stage movable on the base in first and second directions, a first member movable relative to the base in the first direction, and a second member movable relative to the base in the second direction. The first member is placed on the second member. With this arrangement, drive reaction-forces generated due to movement of the stage can be canceled by moving the first and second members, resulting in a smaller space needed for accommodating a canceling mechanism.

Stage apparatus, exposure apparatus, and device manufacturing method

This invention discloses an apparatus having a base and a movable body which is driven to move along the base. The apparatus includes a generator configured to generate a driving signal for the movable body, a temperature adjusting mechanism configured to adjust temperature of the base, and a controller configured to control a manipulated variable for the temperature control mechanism based on the generated driving signal.

Positioning apparatus, exposure apparatus, and device manufacturing method

A driving apparatus which drives an object. The apparatus includes an electromagnetic actuator having a movable element and a stator, a surrounding member surrounding a heat portion of the electromagnetic actuator, a beam which provides the object with a driving force in accordance with movement of the movable element, a connecting member connecting the movable element and the beam, wherein the surrounding member has an opening allowing the movement of the movable element, the opening being arranged at a portion of the surrounding member not facing the object, and a heat recovery unit arranged at a position facing the opening.

Driving apparatus and exposure apparatus

A stage device including a movable stage, a plate-like base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base according to a movement of the movable stage. The plate-like base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the plate-like base.

Stage device, exposure apparatus, and device manufacturing method

An object holding apparatus including a chuck for holding an object, a holder configured to hold the chuck, a generator provided in the holder and configured to generate a field related to an attraction force, a member provided in the chuck and configured to be attracted by the generator in accordance with the field, and a support configured to support one of the generator and the member. The support is configured to allow the one to move toward the other and away from the other, and the support includes a leaf spring.

A positioning apparatus includes first and second stages, a pair of first mirrors having reflective surfaces disposed on the first stage at an acute angle with a vertical axis, a pair of second mirrors disposed on the second stage and having reflective surfaces orthogonal to the vertical axis, a reference structure functioning as a reference for measuring the vertical position of the second stage, a pair of third mirrors disposed on the reference structure and having reflective surfaces orthogonal to the vertical axis, and a pair of interferometers for measuring the vertical position of the second stage using the first, second, and third mirrors.

Positioning apparatus and photolithography apparatus including the same

Disclosed is a moving mechanism which includes a first structural member having a first guide surface, a moving member being movable along the first guide surface, a second structural member having a second guide surface, and an actuator having a movable element provided on the moving member and a stator being movable along the second guide surface, wherein the first and second structural members are isolated from each other with respect to vibration, such that displacement of the stator due to a reaction force as the moving member is driven does not have an influence to the moving member guide surface.

Growing community of inventors

Utsunomiya, Japan

Hideo Tanaka