Kokusai Electric Co., Ltd.

Chugai Seiyaku Kabushiki Kaisha

Hideo Shimura

Yukinori Aburatani

Yuji Yoshida

Takeshi Sugimoto

Hisashi Yoshida

Toshikazu Karino

Kazuhito Ikeda

Shinichiro Watahiki

Shuji Yonemitsu

Kazumasa Kinoshita

Kiyoshi Yoshinari

The object of the present invention is to provide a sheet applicable for closing an opening of a liquid dispensing container for a liquid handling system used in chemical experiments, in which the sheet is capable of preventing natural volatilization of a liquid in the container even if the tip is frequently inserted and drawn, and also facilitating inserting and drawing of the tip. The composite sheet of the present invention comprises a sheet having elastic property and another sheet having slip property wherein the sheets are stacked. The composite sheet of the present invention can be used to close an opening of a liquid dispensing container for a liquid handling system used in chemical experiments. It can prevent volatilization of the solvent, and also facilitate inserting and drawing of the tip.

Sheet having elastic property and slip property, and solvent dispensing container using the sheet

A substrate processing apparatus comprises a substrate transfer chamber; a substrate processing chamber disposed on a first side wall of the substrate transfer chamber; an intermediate substrate holding chamber disposed on a second side wall of the substrate transfer chamber; a first substrate holder disposed within the intermediate substrate holding chamber; a second substrate holder disposed within the substrate processing chamber; a first substrate transfer robot, disposed within the substrate transfer chamber, for transferring the substrate between the substrate processing chamber and the intermediate substrate holding chamber; a first gate valve disposed between the substrate processing chamber and the substrate transfer chamber; a second gate valve disposed between the substrate transfer chamber and the intermediate substrate holding chamber; an atmospheric pressure section located opposite to the substrate transfer chamber with respect to the intermediate substrate holding chamber; a third valve disposed between the intermediate substrate holding chamber and the atmospheric pressure section; a cassette holder disposed within the atmospheric pressure section; and a second substrate transfer robot disposed within the atmospheric pressure section, for transferring the substrate between a cassette held in the cassette holder and the intermediate substrate holding chamber.

Substrate transferring mechanism

Substrate processing apparatus with a processing chamber, transfer

A substrate processing apparatus comprises a substrate transfer chamber; a plurality of substrate processing chambers disposed on a first side wall of the substrate transfer chamber and stacked in the vertical direction; a plurality of first gate valves, each being disposed between each of the substrate processing chambers and the substrate transfer chamber; a substrate accommodating chamber disposed on a second side wall of the substrate transfer chamber; a substrate transfer device, disposed within the substrate transfer chamber, for transferring the substrate under reduced pressure between the substrate processing chambers and the substrate accommodating chamber; an elevator disposed outside the substrate transfer chamber and comprising a stationary portion and an elevating portion which is vertically movable with respect to the stationary portion; a rigid connecting member capable of moving through a through-hole formed in a predetermined face of the substrate transfer chamber, the rigid connecting member mechanically connecting the elevating portion and the substrate transfer device through the through-hole; and a sealing member for establishing a hermetic vacuum seal between the predetermined surface and the connecting member which penetrates through the through-hole.

Substrate processing apparatus

Growing community of inventors

Tokyo, Japan

Hideo Shimura