Tokyo Shibaura Denki Kabushiki Kaisha

Hideo Sanpei

Masahiko Hirose

Yoshimi Akai

Katuya Kumagai

Shyoji Hirano

Kunio Matsuno

An information recording medium is manufactured while placing, in a reaction region, a substrate on the surface of which is recorded information in the form of an indented pattern and the surface of which exhibits electrical conductivity. A plasma generating gas is introduced into a plasma generating region which is isolated from the reaction region. The plasma generating gas is activated by microwaves to generate a plasma. The plasma from the plasma generating region and an organic monomer are introduced into the reaction region independently of each other to initiate polymerization of the organic monomer. A dielectric layer of a polymer of the monomer and of a uniform, small thickness is formed along the indented pattern of the target.

Method for manufacturing information recording medium

A process for forming a photoconductive organic film on a substrate by the plasma polymerization reaction of a mixture of an organic compound vapor and a carrier gas activated in a plasma producing region, comprises carrying out the plasma polymerization reaction in the presence of a halogen compound vapor.

Growing community of inventors

Hiratsuka, Japan

Hideo Sanpei