Ube Industries, Inc.

Hideo Nakamura

Tetsuo Yamada

Takeshi Yamao

Yasukazu Kondo

Tadayuki Mitani

A crystalline silicon nitride powder having a high specific surface area and an enhanced sintering property is produced with a high producibility and a large scale, by calcining a silane material comprising at least one nitrogen-containing silane compound in a nitrogen-containing inert gas mixed with 0.1 to 5%, based on the total volume of the mixed gas, of molecular oxygen, preferably at 600.degree. to 1200.degree. C.; baking the resultant amorphous silicon nitride powder in a nitrogen-containing inert gas preferably at 1400.degree. to 1700.degree. C.; and milling the resultant crystalline silicon nitride powder in a mixed gas atmosphere comprising 5 to 40% by volume of molecular oxygen and the balance consisting of an inert gas preferably at 0.degree. to 100.degree. C.

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Ube, Japan

Hideo Nakamura