Kabushiki Kaisha Toshiba

Hideo Miyagawa

Katsuharu Iwamoto

Shunji Shirouzu

Kuniyoshi Tanaka

Minoru Ohta

Ikuo Tashiro

Takiji Ishimura

In a system for measuring a surface potential of a sample, a probe is located above. A surface of the sample with a small gap and is vibrated by a piezoelectronic element which is energized by a oscillator. A potential of the distal end of the probe is changed and is converted into an electrical signal. The surface potential is obtained from the electrical signal.

Surface potential measuring system

A fiber optical displacement sensor having a wider range of measurable distances and displacements. The fiber optical displacement sensor includes a light source means for continuously providing a projection beam of a certain wavelength and a reference beam having another different wavelength. The projection beam and the reference beam are combined by a first photo coupler and transmitted through a projecting optical fiber. Only the projection beam is separated out by a first filter and transmitted to a vicinity of the surface to be measured. On the other hand, the reflection beam and the reference beam separated by the first filter are combined by a second photo coupler, transmitted through a receiving optical fiber, and separated out by a second filter before being processed.

Wide range fiber optical displacement sensor

A fiber optical displacement sensor having a wider range of measurable distances and displacements. The fiber optical displacement sensor includes collimation device, attached to ends of projecting and receiving optical fibers, for collimating a projection beam to be emitted from an end of the projecting optical fiber facing toward a surface to be measured and a reflected beam to be received by an end of the receiving optical fiber facing toward the surface to be measured.

A pressure measuring system wherein light is transmitted from a light source via a first optical fiber to a pressure-receiving diaphragm having a reflecting surface which undergoes a deflection in relation to the pressure being measured. The diaphragm reflects light transmitted thereto to a second optical fiber which transmits the reflected light to a first photosensitive element. A reference optical fiber is arranged approximately coextensive to the first and second optical fibers and transmits light from the light source in round trip fashion along substantially the same path as light transmitted by the first and second optical fibers to a second photosensitive element. The photosensitive elements produce respective electrical signals which are applied to an operational circuit which eliminates variations in the amount of light due to external disturbances by dividing one electrical signal by the other. With such a construction, it is possible to have a pressure measuring system which is unaffected by electromagnetic induction accompanying large currents and high voltages, which enables more accurate and more sensitive pressure measurements.

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Yokohama, Japan

Hideo Miyagawa