Ngk Insulators, Inc.

Seiko Epson Corporation

Hideo Masumori

Yukihisa Takeuchi

Katsuyuki Takeuchi

Tsutomu Nanataki

Nobuo Takahashi

Hideaki Sonehara

Kohei Kitahara

Takahiro Maeda

An ink jet print head is disclosed which includes a flow path unit with nozzles, a pressure generating unit disposed on the flow path unit and having ink pressure chambers formed behind the respective nozzles, and piezoelectric/electrostrictive elements each disposed on a wall defining a corresponding ink pressure chamber, for deforming the wall to change a pressure of the ink pressure chamber, whereby the ink in the ink pressure chamber is jetted through the corresponding nozzle. The pressure generating unit includes a spacer plate having windows which closed by a closure plate and a connecting plate disposed on the spacer plate, so as to give the respective ink pressure chambers. The connecting plate has communication holes through which the ink pressure chambers communicate with the nozzles. The spacer plate, closure plate and connecting plate are formed from respective ceramic green sheets, which are laminated on each other and fired into an integral ceramic structure as the pressure generating unit. The piezoelectric/electrostrictive element includes a pair of electrodes and a piezoelectric/electrostrictive layer, which are formed by a film-forming method on an outer surface of the closure plate.

Multi-layer ink jet print head and manufacturing method therefor

A zirconia diaphragm structure, and a method of producing such structure. The zirconia diaphragm structure includes a zirconia substrate having at least one window, and a zirconia diaphragm plate formed integrally with the zirconia substrate so as to close each window, the zirconia substrate comprising a zirconia material as a major component, and containing 0.1-3.0% by weight of alumina, 0.1-3.0% by weight of silica, 0.1-5.0% by weight of alumina and silica, 0.1-5.0% by weight of alumina and magnesia, or 0.1-5.0% by weight of alumina, silica and magnesia.

Method of producing a zirconia diaphragm structure

A zirconia diaphragm structure, and a method of producing such structure in which the zirconia diaphragm structure includes a zirconia substrate having at least one window, and a zirconia diaphragm plate formed integrally with the zirconia substrate so as to close each window, the zirconia substrate comprising a zirconia material as a major component, and containing 0.1-3.0% by weight of alumina, 0.1-3.0% by weight of silica, 0.1-5.0% by weight of alumina and silica, 0.1-5.0% by weight of alumina and magnesia, or 0.1-5.0% by weight of alumina, silica and magnesia.

Zirconia diaphragm structure and piezoelectric/electrostrictive film

An ink jet print head is disclosed which includes an ink nozzle member with nozzles, an ink pump member disposed on the ink nozzle member and having ink chambers formed behind the respective nozzles, and piezoelectric/electrostrictive elements each disposed on a wall defining the corresponding ink chamber, for deforming the wall to change a pressure of the ink chamber, whereby the ink in the ink chamber is jetted through the corresponding nozzle. The ink pump member consists of a spacer plate having windows which are closed by a closure plate and a connecting plate disposed on the spacer plate, so as to give the respective ink chambers. The connecting plate has communication holes through which the ink chambers communicate with the nozzles. The spacer plate, closure plate and connecting plate are formed from respective ceramic green sheets, which are laminated on each other and fired into an integral ceramic structure as the ink pump member. The piezoelectric/electrostrictive element includes a pair of electrodes and a piezoelectric/electrostrictive layer, which are formed by a film-forming method on an outer surface of the closure plate.

Ink jet print head

A method of producing a ceramic diaphragm structure, including a ceramic substrate having at least one window, and a ceramic diaphragm plate superposed on the ceramic substrate to close the window or windows. The method includes the steps of: firing the diaphragm plate with the ceramic substrate to form an integral sintered body, such that the diaphragm plate provides at least one diaphragm portion aligned with the window or windows; protruding each diaphragm portion outwards, in a direction away from the corresponding window, so that the diaphragm portion is formed into a convex shape; and controlling the amount of protrusion of the diaphragm portion, by pressing a jig having a flat surface or a concave surface, against a top part of the diaphragm portion having the convex shape, so that at least the top part has a flat surface or a curved surface having a predetermined radius of curvature.

Method of producing ceramic diaphragm structure having convex diaphragm

A zirconia diaphragm structure, and a method of producing such structure. The zirconia diaphragm structure includes a zirconia substrate having at least one window, and a zirconia diaphragm plate formed integrally with the zirconia substrate so as to close each window, the zirconia substrate comprising a zirconia material as a major component, and containing 0.1-5.0% by weight of one of combinations consisting of (i) alumina and calcia, (ii) alumina, calcia and magnesia, (iii) alumina, calcia and silica, and (iv) alumina, calcia, magnesia and silica.

Zirconia diaphragm structure, method of producing the same, and

A method of producing a piezoelectric/electrostrictive actuator including preparing first, second and third ceramic green sheets, and laminating the green sheets to form an unfired ceramic body which is then fired. The first, second and third green sheets form spacer, closure, and connecting plates, respectively, the spacer plate having a plurality of windows. An outer surface of the connecting plate that is remote from the spacer plate is machined so as to have a maximum waviness of not larger than 50 .mu.m. Additionally, piezoelectric/electrostrictive elements are formed on an outer surface of the closure plate over respective pressure chambers defined by the windows in the spacer plate.

Method of producing a piezoelectric/electrostrictive actuator

An actuator including a ceramic substrate and at least one piezeoelectric/electrostrictive element formed on the substrate is disclosed. The ceramic substrate includes a spacer plate having at least one window which provides at least one pressure chamber, each window being substantially closed by a closure plate and a connecting plate. The spacer plate, closure plate and connecting plate are formed from respective ceramic green sheets which are laminated on each other and fired into an integral ceramic structure as the ceramic substrate. The connecting plate has at least one slit which corresponds to each pressure chamber. Each piezoelectric/electrostrictive element is disposed on a portion of the closure plate defining the corresponding pressure chamber, so as to change a pressure of the corresponding pressure chamber. Also disposed is an ink jet print head using the actuator as described above.

Actuator having ceramic substrate with slit(s) and ink jet print head

A ceramic diaphragm structure which includes a ceramic substrate having at least one window, and a ceramic diaphragm plate which is superposed on the ceramic substrate so as to close the window or windows. The diaphragm plate is fired with the ceramic substrate to form an integral sintered body. The diaphragm plate includes at least one diaphragm portion which is/are aligned with the window(s), respectively, and each diaphragm portion protrudes outwards, in a direction away from the corresponding window, to form a convex shape. Also disclosed is a method of protuding such a ceramic diaphragm structure, in which the diaphragm portion is formed into convex shape, upon firing of the ceramic substrate and ceramic diaphragm plate.

Ceramic diaphragm structure having convex diaphragm portion and method

Zirconia diaphragm structure and piezoelectric/electrostrictive element

A piezoelectric/electrostrictive actuator including a ceramic base member having a pressure chamber or chambers, and a piezoelectric/electrostrictive element or elements is disclosed. The base member includes a spacer plate having at least one window which provides the pressure chamber(s), and which is closed by a closure plate and a connecting plate disposed on the opposite surfaces of the spacer plate. The spacer plate, closure plate and connecting plate are formed from respective ceramic green sheets which are laminated on each other and fired into an integral ceramic structure as the ceramic base member. Each piezoelectric/electrostrictive element is disposed on a wall partially defining the corresponding pressure chamber, for deforming the wall so as to change a pressure of the corresponding chamber. The element has a piezoelectric/electrostrictive unit consisting of a pair of electrodes and a piezoelectric/electrostrictive layer, which are formed by a film-forming method on an outer surface of the closure plate of the base member.

Piezoelectric/electrostrictive actuator having integral ceramic base

A piezoelectric/electrostrictive actuator including a ceramic substrate and piezoelectric/electrostrictive elements is disclosed. The ceramic substrate includes: a spacer plate having a plurality of windows formed in a row in the longitudinal direction of the spacer plate, and auxiliary windows formed adjacent to respective two outermost windows which are located at the opposite ends of the row of the plurality of windows, such that the auxiliary windows sandwich the row of the plurality of windows; and a closure plate superposed on one of opposite major surfaces of the spacer plate, so that the plurality of windows and the auxiliary windows of the spacer plate are closed by the closure plate to provide pressure chambers and enclosed spaces, respectively, within the substrate. The spacer plate and the closure plate are formed from respective ceramic green sheets which are laminated on each other and fired into an integral structure as the ceramic substrate. The piezoelectric/electrostrictive elements are disposed on respective portions of the closure plate which partially define the pressure chambers, respectively, but are not disposed on respective portions of the closure plate which partially define the enclosed spaces corresponding to the auxiliary windows.

Piezoelectric/electrostrictive actuator having ceramic substrate with

A ceramic composition for an electronic circuit board, a hybrid integrated circuit, an integrated circuit package or a multilayer ceramic structure, consisting essentially of at least one electrically insulating glass, at least one organic binder, at least one inorganic peroxide, and at least one material selected from the group which consists of: a metal selected from the platinum group; a compound of the platinum group; a manganese oxide; and a cobalt oxide.

Ceramic composition for dielectrics

A ceramic composition for dielectrics, consisting essentially of an inorganic dielectric material including at least one electrically insulating glass and at least one organic binder, and further comprising at least one inorganic peroxide. The inorganic peroxide serves to facilitate burnout or removal of the organic binder during firing of the ceramic composition and minimizes the content of residual carbon in the fired ceramic composition. The inorganic peroxide is preferably selected from the group consisting of calcium peroxide, strontium peroxide, barium peroxide, zinc peroxide and cadmium peroxide, and present preferably in an amount of 0.1-40% by weight. Also disclosed is a process of manufacturing a ceramic circuit board using the ceramic composition stated above.

Growing community of inventors

Anjo, Japan

Hideo Masumori