Canon Kabushiki Kaisha

Hideo Akiba

Keiji Hirabayashi

Toshinao Tatsuno

Shinji Fukui

Kyohei Ishikawa

A substrate holding board includes a first layer and a second layer forming an interfacial surface with the first layer. The first layer and the second layer contain diamond-like carbon. A refractive index of the first layer in a wavelength is higher than a refractive index of the second layer in the wavelength. A distance from the second layer to a topmost surface of the substrate holding board is smaller than a thickness of the first layer.

Substrate holding board, manufacturing method of device, and exposure device

An optical device includes, in sequence, a surface formed of a metal oxide, a samarium oxide-containing layer in contact with the surface formed of a metal oxide, and a magnesium fluoride-containing layer in contact with the samarium oxide-containing layer so as to suppress optical absorption resulting from high-rate sputter deposition of a magnesium fluoride-containing layer on a surface formed of a metal oxide.

Optical device and manufacturing method therefor

The present invention relates to an optical multilayer coating placed on or above a substrate. The optical multilayer coating includes a high-refractive index layer with a refractive index of 1.76 to 2.7, a magnesium oxyfluoride layer, and a magnesium fluoride layer. The high-refractive index layer, the magnesium oxyfluoride layer, and the magnesium fluoride layer are stacked on or above the substrate in this order and are in contact with each other. The magnesium oxyfluoride layer has a composition represented by the following formula:MgOF&#x2003;&#x2003;(1)

Optical multilayer coating, optical lens, and method of manufacturing optical multilayer coating

In a method for forming a metal fluoride film, a metal fluoride film is formed on a substrate by sputtering using a metal target and a mixed gas containing Ogas and a reactive gas being a fluorocarbon gas.

Growing community of inventors

Utsunomiya, Japan

Hideo Akiba