Fujikin Inc.

Hidenori Kiso

Tsutomu Shinohara

Ryutaro Tanno

Yuya Suzuki

Michio Yamaji

Tomohiro Nakata

Tsuneyuki Okabe

Tsuyoshi Tanikawa

Akihiro Harada

Keisuke Ishibashi

Takashi Funakoshi

Ichiro Tokuda

Kuniyasu Sakashita

Taichi Kitano

Hiroaki Kikuchi

Yoshiaki Watanabe

A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. Further, a fluid leak abnormality is identified as a change accompanying an operation of the fluid control device and the fluid leaks is detected with high accuracy. A fluid control device, having a flow path and a closed space isolated from the flow path by a diaphragm and capable of detecting an abnormality, includes a pressure sensor detecting a pressure inside of the closed space, a processing module executing a predetermined information process, and an operation detecting mechanism detecting an operation of the fluid control device. The processing module executes a discriminating process discriminating abnormality of the fluid control device by comparing a detected value detected by the pressure sensor with a predetermined threshold value, and a correcting process correcting the predetermined threshold value in accordance with the operation of the fluid control device.

Fluid control device, abnormality detection method of fluid control device, abnormality detection device, and abnormality detection system

An entire fluid supply line or an entire fluid controller constituted by a plurality of fluid control devices is precisely monitored. A fluid controller G accumulating and having a plurality of fluid control devices A. The fluid control devices A include an operation information acquisition mechanism acquiring an operation information in the fluid control devices, an identification information storagestoring a self-identification information, and a communication processing unittransmitting the operation information acquired by the operation information acquisition mechanism to an external terminal with the self-identification information stored in the identification information storageat different timings for each of the fluid control devices A.

Fluid control apparatus, fluid control device, and operation analysis system

A fluid control device, capable of acquiring data related to an internal operation of a device, is provided. The Fluid control device V includes a bonnet part installing sensors for detecting the internal operation of the fluid control device and a valve body containing the bonnet part inside, and the valve body has a recess for containing the bonnet part and a slit, leading a communication cable connected to the sensors to the outside, opening one end on an opposite side of a base where a flow path is formed, and penetrating from an outside to the recess.

Fluid control device

A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. The fluid control device includes a valve body in which the flow path is formed, a diaphragm isolating a closed space from the flow path, a bonnet forming the closed space between the diaphragm and providing a penetration hole connected to the closed space and penetrated to be able to vertically move a diaphragm retainer, the diaphragm retainer vertically moving in the penetration hole to press the diaphragm and providing an increased diameter portion not to be removed from the penetration hole, a pressure sensor detecting a pressure inside of the closed space, and an elastic body interposing between the increased diameter portion of the diaphragm retainer and the bonnet inside of the closed space and elastically expanding and deflating between the increased diameter portion of the diaphragm retainer and the bonnet as the diaphragm retainer vertically moves.

A first on-off valve () and a second on-off valve () each are a two-port valve. A first passage block () is provided with a first on-off valve-corresponding inflow passage () and a first on-off valve-corresponding outflow passage (). A second passage block () is provided with a second on-off valve-corresponding inflow passage () and a second on-off valve-corresponding outflow passage (). The second on-off valve-corresponding outflow passage () is in communication with an upstream side portion of the first on-off valve-corresponding outflow passage () via a communicating passage () formed in the first passage block (). An orifice () is provided between the second on-off valve-corresponding outflow passage () and the communicating passage ().

Shutoff-opening device

A fluid controller that reduces an increase in cost by additional components or additional processes for setting means, and solves the problem that a set value of an upward movable amount of a stem changes is provided. An upper surface of an outer peripheral edge portion of a diaphragm holderand a lower surface of an inner peripheral edge portion of a holder adapterare formed so as to oppose to each other with a first gap A interposed therebetween. By setting the first gap A to a predetermined value, an upward movable amount of the diaphragm holderis set.

Fluid controller with diaphragm

Provided is a diaphragm valve that is capable of increasing its flow rate and is capable of suppressing variation among the diaphragm valves in the flow rates. In a diaphragm valve, a fluid that has flown into the fluid inflow channelenters a fluid outflow channelvia through holesof a seat holder. On a bottom surfaceof a depressionof a body, a seat receiving surfacethat receives a seatis flush with a seat-holder receiving surfacethat receives a seat holder. In the bottom surface of the depressionof the body, an annular groovefacing through holesof the seat holderis formed.

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Osaka, Japan

Hidenori Kiso