Asahi Kogaku Kogyo Kabushiki Kaisha

Hidenori Horiuchi

Masaaki Aoyama

Goro Kitamura

Tokuhisa Ito

A comparison-type dimension measurement system in which a laser 1 provides linearly polarized light that is directed by a polarization beam splitter 5 into a microscope system in which a specimen 13 is mounted. The reflected polarized light is rotated 90.degree. by a quarter wave plate 9 and passes through the beam splitter to a multi-element line sensor 19. The laser light is scanned by a rotatable mirror 3 over the specimen. Threshold intensities are determined on indicia of known separation on a reference specimen and used to calibrate the distance measured by the line sensor.

Comparison type dimension measuring method and apparatus using a laser

An automatic focusing device for vertical focusing of a specimen 23 in which an enlarging condenser lens 11 is placed between a light source 12 and a half mirror 7 in an automatic focus detecting system so that an enlarged image 24 of the light source is presented to an objective 1 of the focusing microscope M.

Growing community of inventors

Tokyo, Japan

Hidenori Horiuchi