Gigaphoton Inc.

Calsonic Kansei Corporation

Hidenobu Kameda

Osamu Wakabayashi

Masato Moriya

Hakaru Mizoguchi

Takashi Suganuma

Junichi Fujimoto

Kouji Ashikawa

Yuichi Meguriya

Kazuhiro Idei

Kazue Yoshida

Shunichi Yamanaka

A laser apparatus may include a master oscillator, an optical unit provided in a beam path of a laser beam from the master oscillator, a beam adjusting unit provided upstream from the optical unit in a beam path of the laser beam and configured for adjusting at least one of a beam path and a wavefront of the laser beam, a first detection unit provided between the beam adjusting unit and the optical unit in a beam path of the laser beam and configured for detecting the laser beam, a second detection unit provided downstream from the optical unit in a beam path of the laser beam and configured for detecting the laser beam, and a controller configured for controlling the beam adjusting unit based on outputs from the first and second detection units.

Laser apparatus and extreme ultraviolet light generation system

A holder device for holding an optical element includes a holder having first and second members to sandwich the optical element therebetween, and a sealing member for creating a seal between the second member and the optical element.

Holder device, chamber apparatus, and extreme ultraviolet light generation system

A target supply unit may include: a reservoir for storing a target material; a heater provided inside the reservoir for heating the target material stored in the reservoir; a heater power supply for supplying current to the heater; and a target outlet for outputting the target material stored inside the reservoir.

Target supply unit

A window unit may include: a window configured to allow a laser beam to be transmitted therethrough; and a holder for holding the window at a periphery thereof, the holder being provided with a flow channel thereinside configured to allow a fluid to flow.

Window unit, window device, laser apparatus, and extreme ultraviolet light generation system

A heat exchanger includes a plurality of plate-shaped heat exchanger units and a plurality of flat fins arranged on the units, respectively. Each of the units has a first planar fluid communication chamber for receiving the flat fin. The flat fin has a first end provided with a first recess and a second end opposing to the first end and provided with a second recess. The first recess includes a circular opening and a cutout part. The second recess includes a circular opening and a cutout part. A clearance is defined between an edge of the first end and an inner periphery of the chamber, while another clearance is defined between an edge of the second end and the inner periphery. Consequently, a fluid can flow along the edge of the first end after being introduced into the first planar fluid communication chamber through the first recess.

Heat exchanger

A pure water tank for a fuel battery power generating system includes a tank body and a heat insulation mechanism arranged in the circumference of the tank body. By this heat insulation mechanism, the freezing of pure water in the tank body is prompted from the side of a bottom wall of the tank body. In the tank body, the growth of an ice gorge progresses from the side of the bottom wall toward a top wall of the tank body along its side walls and finally, the pure water freezes totally. Since the expansion of water due to its freezing is allowed in the upper space of tank body, the deformation of the side walls can be prevented. For promoting to thaw out the frozen water, a jacket is formed so as to extend from the bottom wall of the tank body to the side walls. A plurality of heat medium tubes may be provided to cross the interior of the tank body between an introductory side pipe of the jacket and an emissary side pipe of the jacket. Then, by introducing liquid heat medium into the jacket and the heat medium tubes, both peripheries and center of the ice gorge are firstly heated, so that the whole ice gorge can be thawed out in a short time.

Growing community of inventors

Oyama, Japan

Hidenobu Kameda