Shimadzu Corporation

Hidenobu Ishida

Sadamu Tomita

Tomomi Tamura

An X-ray generator includes an electron source generating an electron beam, a target generating an X-ray by a collision of the electron beam and extending in a direction orthogonal to the electron beam, and a cylindrical electrode covering a collision portion of the target to which the electron beam collides and having a bore allowing the electron beam to pass through. The electron source and the target are arranged in such a way that the X-ray is radiated in the direction orthogonal to an optical axis of the electron beam. A depression equivalent to a notch of the target is provided in a collision face side of the electron beam on the target and also in a reverse location of a tip of the target located on an outgoing radiation side of the X-ray relative to a collision location of the electron beam on the target.

X-ray generator

The following arrangement is adopted to achieve an X-ray spectroscope capable of simultaneously spectrally analyzing, with a single spectral scanning, X-rays emitted from a point-like X-ray source in a plurality of wavelength ranges such that X-rays in a wide wavelength range can spectrally be analyzed with a single spectral scanning. In an X-ray spectroscope in which a point-like X-ray source, a spectral crystal and a X-ray detector are disposed along a Rowland circle and in which, with the distance between the X-ray source and the spectral crystal maintained equal to the distance between the spectral crystal and the X-ray detector, this distance is continuously changed such that the wavelength of X-rays to be spectrally analyzed is continuously changed, the X-ray spectroscope is characterized in that the spectral crystal comprises a plurality of arcuate crystals for spectrally analyzing respective X-rays different in wavelength, that at least one of the arcuate crystals is located at a position apart from the reference plane including the Rowland circle and that the X-ray detector comprises at least one X-ray detector for detecting the X-rays diffracted by the arcuate crystals.

Growing community of inventors

Kyoto, Japan

Hidenobu Ishida